1. I3T Modeling flow : September-2011 Modeling flow and models improvement for I3T ON Semiconductor technologies Petr Betak, Petr Zavrel, Lenka Sochova, Jan Plojhar MOS-AK September 2011

2. I3T Modeling flow: September-2011 Overview OVERVIEW: ON technologies WHAT IS MODELING GENERAL FLOW IN MODELING  Data For Modeling Purpose  Built up model card as a subcircuit DEVICES (focus on I3T80 & I3T50)  CMOS  DMOS  BIPOLARS  DIODES  RESISTORS  CAPACITORS SPECIAL CASES, MODEL IMPROVEMENT

3. I3T Modeling flow: September-2011 Overview: ON technologies Bipolar : BIP14V, BIP18V, BIP30V, BIP50V, ON50... BCD : ONC25 (0.25um), PS5, AIM Analog CMOS: ACMOS, ONC110 (0.11um), ONC18 (0.18um), ONC25(0.25um) VHVIC (very high voltage) analog CMOS BCDMOS: I2T100 (0.7um) I3Txx: I3T25, I3T50, I3T80 (0.35um) C3, C5 (0.35um, 0.5um) Special: Low Vf Rectifiers, Integrated Power devices, HV FET, Microintegration...

4. I3T Modeling flow: September-2011 WHAT IS MODELING? DEVICE MODEL - set of mathematical relations between node voltages and terminal currents GOAL - accurately represent electrical behavior in circuit simulators DEPENDEND ON DIFFERENT KIND OF PARAMETERS: –technology parameters –geometry (layout) parameters –empirical (fitting) parameters enm (d g s b) enm_model w=10 l=0.8 model enm_model bsim3v3 type=n + vth0 = 0.582 + u0 = 290 + rdsw = 749.6872 + tox = 7.10e-9 + vsat = 5.55e4 + k1 = 0.55 + dvt0 = 10.7 + cj = 1.02e-3 + cjsw = 3.11e-10 + cjswg = enm_cjswg + js = 3.5e-7 + jsw = 5e-13 ……. ….. DEVICE EQUATIONS MODEL

5. I3T Modeling flow: September-2011 GENERAL FLOW IN MODELING Data for Modeling Purpose DC : IV curves mismatch junction leakage, substrate leakage process variation AC low frequency: junction capacitance low frequency noise Building up the model card as a sub circuit 1/ Model extraction of the main device - ICCAP,UTMOST, Matlab, Perl routines are used for optimization purpose 2/ Adding models of the parasitic component 3/ Building up corners (3 corners) 4/ Implementation of the SOA flags based on Reliability inputs 5/ Implementation of the matching parameter into the model 6/ Model of ESD cells Testchip WL arrays Matching frames RF frames Model Kit & test Running basic and specific tests at device level (simulate a netlist) and at circuit level (simulation of schematic in Design Environment)

6. I3T Modeling flow: September-2011 Data For Modeling Purpose  DC MEASUREMENT DATA measured on golden wafers of different lots:  IV curves, transforms  temperature sweeps  different dimensions (W,L matrix)  CV MEASUREMENT DATA measured on golden wafers of different lots:  CV curves, junction capacitances  frequency sweeps  different dimensions (W,L matrix)  S PARAMETERS DATA measured on golden wafers of different lots:  capacitance extraction  high frequency verification  NOISE measurement, matching extraction...

7. I3T Modeling flow: September-2011 Built up model card as a subcircuit STANDARD MODEL (BIPOLAR-VBIC,MOS -BSIM3V3..) MACROMODEL= several standard model devices (DMOS –DMOS AMIS MACROMODEL..) 1/ Model extraction of the main device - ICCAP,UTMOST, Matlab, Perl routines are used for optimization purpose 2/ Adding models of the parasitic component 3/ Building up process corners (3 corners) 4/ Implementation of the SOA flags based on Reliability inputs 5/ Implementation of the matching parameter into the model 6/ Model of ESD cells Difference between identically designed analogue devices is modelled on the base of PELGROM FORMULA: fast typical slow

8. I3T Modeling flow: September-2011 I3T80 & I3T50 DEVICES Short overview of model features & limitations per device groups: Low Voltage MOS High Voltage MOS Bipolar Transistors Diodes Resistors Capacitors

9. I3T Modeling flow: September-2011 Low Voltage MOS Model Features: BSIM 3v3, BSIM4 model SOA, Matching DC (geom., temp., leakage) AC (CV + 1/f noise) Multi-fab / process corners Verified till 200C Model Limitations: Moderate/weak inversion inaccuracy Incapable of RF modeling Pocket Diode: NEPI-to-PSUB (NLVD, NMVD) DEVICE MODEL nmosNepi strap P-substrate +

10. I3T Modeling flow: September-2011 channel region drift region High Voltage MOS Model Features JFET(J1) for drift region (model IDSAT & Ron) Standard BSIM3v3 dominant MOS (M1) model channel part (VTH & BETA) AC behaviour modelled by dominant MOS & added shorted MOSFETs (M2 & M3) Parasitic diode integrated in subcircuit Formula for BLN res. SOA, Matching Verified till 200C 1/f noise Limitations No parasitic BJT No self-heating AC modelled at 100kHz Pocket diode NEPI/BLN-to-PSUB DEVICE MODEL Nepi +

11. I3T Modeling flow: September-2011 MOS & DMOS DC MODELING –IDVG over temp. and over size –VTH, short & narrow channel effect –Body effect –IDVD over temp. and over size –IDSAT & RON over size lfpdm80 output curves Ron IDSAT NMOS short channel effect

12. I3T Modeling flow: September-2011 MOS & DMOS Vth & Beta Matching AC –Cgs, Cgd over size for different VG & VD 1/f noise INTRINSIC MOSFET ACCUMULATION MOSFET

13. I3T Modeling flow: September-2011 Model Features: VBIC (NPN) model & BJT (PNP) Vertical devices Checked till 200C DC  Gummel Poon (+ Beta vs. Ic)  Output characteristics (+ Early Voltage)  Validated on band-gaps (∆VBE tuned)  Base-emitor breakdown and parasitic PNP (for NPN) AC  diffusion and depletion capacitances Bipolar Transistors Matching Model Limitations No S-param validation No 1/f noise

14. I3T Modeling flow: September-2011 Diodes / Junctions Model Features: DC - forward - Breakdown & leakage - done for -30C till 200C AC (capacity modelled) SOA Based on diode, dio500 standard models Model Limitations: Transit-time model=charged based model, not accurate enough Parasitic bipolar not modelled Snap-back not modelled for ESD diodes FORWARD BREAKDOWN & LEAKAGE CAPACITANCE

15. I3T Modeling flow: September-2011 Resistors sheet res. temperature dep. correction Model Features: POLY,Diff. Resistors,METAL RESISTORS matching based on Pelgrom formula for resistance std. deviation based on phy_res, resistor, bsource standard models verified form -40C till 200C Model Limitations: TC not modelled over corners & over size TC based on typical silicon, only PPOR statistically verified

16. I3T Modeling flow: September-2011 Capacitors Model features: MIM capacitor, metal to metal cap., horizontal bar & plate cap. Voltage linearity and temperature dependency model (TC) Scalable according the bar, width & length Verified till 125C SOA implemented Model limitations: no matching in the models minimum dimension of device at least 10um resistance & self inductance not included MIMC

17. I3T Modeling flow: September-2011 Special cases, model improvement Model conversion into different simulator language SPECTRE, ELDO, HSPICE: ->HSPICE model of the physical resistor Modeling of the substrate current and recovery charge: JUNCTION DIODES: ->Enhanced NQS Lauritzen diode model

18. I3T Modeling flow: September-2011 HSPICE model of the physical resistor Circuit connection of the model elements in HSPICE for SPECTRE “subtype=p” Circuit connection of the model elements in HSPICE for SPECTRE “subtype=n” Circuit connection of the model elements in HSPICE for SPECTRE “subtype=poly”

19. I3T Modeling flow: September-2011 HSPICE model of the physical resistor Example of the Physical resistor conversion Comparison of the SPECTRE and HSPICE results

20. I3T Modeling flow: September-2011 ENHANCED NQS LAURITZEN DIODE MODEL PARA DIODE (POCKET DIODE): NQS diode verilog model for KPsub diode current source model lAPsub=f(IPsub) breakdown diode (SPICE) MAIN DIODE: NQS diode verilog model for AK diode ( dioAREAmain and dioPERImain ) substrate current source model IPsub=f(IA) breakdown diode (SPICE)

21. I3T Modeling flow: September-2011 tau,tt Comparison of current in time during recovery for measured diode (ia.m - blue) and NQS Lauritzen updated model (ia.s - cyan) Extraction of diffusion capacity The indirect approach of tuning and measuring reverse recovery effect consists in measuring S-parameters and extraction of a diffusion capacitance of forward biased diode in the area of threshold voltage region (OFF state to ON state) with the voltage step of 5 mV [3]. NQS updated Lauritzen model (blue) vs. measured (extracted) diffusion capacity (cyan) ENHANCED NQS LAURITZEN DIODE MODEL Reverse recovery effect modeling

22. I3T Modeling flow: September-2011 The current source IPsub: model of the substrate current dependent on current flowing through the MAIN DIODE(IA ) expressed by (1), where m=1.606 and n= -5e-3 are variables to tune the current behavior, determined based on measurement data Current source model The proposed macro-model of diode enhances the standard diode model by adding Lauritzen NQS model of reverse recovery effect and the model of the diode cathode-to-substrate junction. The updated macro-model of the diode visibly improves reverse recovery effect simulation results. The proposed model of substrate current also fits well the measured data as well as reverse current from measured at the substrate node. What is also positive point, the updated NQS model of investigated diode do not leads to convergence problem and do not increase simulation time. ENHANCED NQS LAURITZEN DIODE MODEL Conclusion The current added by PARA DIODE to MAIN DIODE IAsub=g(IPsub) is lower level of magnitude, ca. 0.1% of MAIN DIODE IA stream ad is of same model where n= -66e-6 & m=5.163 (1)

23. I3T Modeling flow: September-2011 REFERENCES [1]P.O Lauritzen, C.L. Ma, “A Simple Diode Model with Reverse Recovery”, IEEE Transaction on Power Electronics, Volume 6, Issue 2, April 1991, pp. 188-191 [2]Sauter Martin, “Reverse Recovery Effects in SPT5 Diodes”, Infineon Technologies papers, IC-CAP Modeling Handbook, internet source: http://edocs.soco.agilent.com/pages/viewpage.action?pageId=105321342 [3]Sischka Franz, “IC-CAP Learning Week”, Agilent Technologies, EEsoft EDA Europe, May 2010 [4] A.Vladimirescu, The Spice Book New Yorl, 1994, John Wiley & Sons, Inc [5] Cadence Circuit Components and Device Models Manual Product Version 6.1, December 2006, CADENCE [6] HSPICE Reference Manual: Elements and Device Models Version C-2009- 09, September 2009,. SYNOPSYS [7] ELDO Users’s Manual Software version 6.10_2 Release AMS 2007.2a, 2007,. MENTOR GRAPHICS CORP. [8] Stanislav Banas, et al. “Enhanced NQS Lauritzen Diode Model”, MIXDES, 2011, Proceedings of the 18th International Conference, pp. 82-84