1. RFID Presented by Brian Ng Chun Heng The Usage of RFID in Semiconductor Automation

2. Old System & Problem Identification Old system of lot tracking in Wafer Fabs (runsheet system) Old system of lot tracking in Wafer Fabs (runsheet system) Problems of runsheet system : Problems of runsheet system : - Human interventions - Human interventions - Time Wastage - Time Wastage - Errors (lost/misprocessed) - Errors (lost/misprocessed)

3. Solution Replacing the old system Replacing the old system Designing a new lot tracking system Designing a new lot tracking system RFID provides a feasible replacement RFID provides a feasible replacement WHY RFID ? Doesn’t require HUMAN INTERVENTION! Doesn’t require HUMAN INTERVENTION! Easier to manage lots tracking/movements Easier to manage lots tracking/movements Reduce particle generating source Reduce particle generating source

4. What is RFID ? Radio Frequency Identification Device Radio Frequency Identification Device Transmission of “identity” wirelessly Transmission of “identity” wirelessly Using Radio Waves. Using Radio Waves.

5. RFID and Barcodes Comparison PROPERTYBARCODESRFID Line of Sight Required YESNO Can be read in Sunlight? NOYES Operator Involved YESNO Grease or Grim Affected Not Affected Aesthetic integration with product NOYES Additional memory NO 8Kbits (Max) In-situ read/write capability Read Only Read and Write Encryption Possibility NoYes Multi-tag arbitration NoYes

6. RFID Components Consist of 3 Basic Components Transponder - Affixed to the Item Transponder - Affixed to the Item Reader - Read/Write/Communicate Reader - Read/Write/Communicate Data Center - Read and Store Information Data Center - Read and Store Information

7. RFID in Other Usages Security – Access Controls Security – Access Controls Anti-Theft System Anti-Theft System Tracking Hospital Patients Tracking Hospital Patients Running events Running events Safety Crossing Guards Safety Crossing Guards Parking Lots Parking Lots Electronic Payments Electronic Payments

8. Questions?