1. A world class facility to develop the technology needed the technology needed to fulfill the CITRIS vision. 18 / 9 / 2001UC Berkeley Microfabrication Laboratory1

2. 18 September 2001UC Berkeley Microfabrication Laboratory2 Energy Efficiency - networked miniature sensors proposed for monitoring building conditions to maximize efficiency of utility systems CITRIS Research Priorities Disaster Response - new sensors for rapidly determining casualties, structural integrity, and most effective emergency response Low energy 16mm3 integrated sensor KSJ Pister Group Micromirror Drive Mechanism M.P. Young Microfabricated neural probe L.P. Lee group

3. 18 September 2001UC Berkeley Microfabrication Laboratory3 Transportation - optoelectronic sensors required for analysis of traffic flow to maximize efficiency of transportation networks CITRIS Research Priorities Healthcare - discrete sensors for automated or point of use health monitoring. Integration with biological receptor materials of BNC. Biological processing microdevice A.P. Pisano, T.D. Sands groups Electrolytic oxygen microbubbler R.T. Howe, J.D. Keasling groups Environment – networked sensors for automated air and water analysis to enable immediate detection of and response to contamination situations

4. 18 September 2001UC Berkeley Microfabrication Laboratory4 ICs MEMS Optoelectronics Bioelectronics The Challenge: Integrate Research across several disciplines

5. 18 September 2001UC Berkeley Microfabrication Laboratory5 Optoelectronic materials Berkeley Microlab Berkeley Sensor and Actuator Center Integrated Circuit Design MEMs The opportunity: The Integrated Microfabrication Facility

6. 18 September 2001UC Berkeley Microfabrication Laboratory6 Based Upon the Successful Microlab Model: Shared Laboratory Capabilities Common Academic Model: Individual Fiefdoms Successful Microlab Model: Shared Laboratory The shared model implies professional administration and support staff, funded by “per use” fees:  efficient use of valuable laboratory space  significant improvement in quality of support  PI research flexibility  research cross fertilization

7. 18 September 2001UC Berkeley Microfabrication Laboratory7 Existing Microlab / Future IMF: Accessible to All >70 Principal Investigators; 7 departments, >240 active users from UCD, UCSB and UCSD LBL, LLNL, Sandia NL

8. 18 September 2001UC Berkeley Microfabrication Laboratory8 A Unique High Tech Incubator among the California Institutes for Science and Innovation The Berkeley Microfabrication Laboratory Affiliates has 28 member companies, many with fewer than 10 employees. The IMF will greatly expand these activities. Onix Microsystems, Inc. Paracer, Inc. Photon Imaging, Inc. Progressant Technologies Robert Bosch Corporation Sandia National Lab MicroAssembly Tech MicroGen Systems Molecular Reflections Nanochip, Inc. NewPeregrine, Inc. Network Photonics Inc. OMM, Inc. DICon Fiberoptics, Inc. Emitronix, Inc. General Nanotechnology GENOA Corporation Hewlett-Packard Company Jet Propulsion Laboratory MEMS PI Adriatic Research Institute Advanced Integrated Photonics Alien Technology Corp. Analog Devices Bandwidth9 Bluefox Covalent Materials, Inc.

9. 18 September 2001UC Berkeley Microfabrication Laboratory9 Compound semiconductor processing for integration of optoelectronic components Berkeley Microlab Integrated Microfabrication Facility MEMs processing compatible with biologically modified substrates and silicon ICs Bioengineering Nanotechnology Center Integrated Materials Laboratory Silicon Integrated circuit fabrication with better than 0.25  m minimum geometries Education - fiber connected teaching laboratories for long distance learning and remote access to specialized analytical equipment.

10. 18 September 2001UC Berkeley Microfabrication Laboratory10 20,000 ft 2 Class 100 clean room (1 st floor) 16-20 ft ceilings and 20-30 ft spans critical for equipment installation 8” silicon, 8”/6” MEMs, optoelectronics, and multi-substrate integration Significant Infrastructure Requirements 16,000 ft 2 utilities and support (basement / roof / perimeter) 5000 gal DI water, 7gpm, 60gpm non-DI recirc. chilled water 30 changes per hour air filtering, 60 ft 3 /min 80-100psi clean dry air multiple hazardous gas and liquid effluent treatment systems 300 tons cooling capacity, >50,000 ft 3 /min supply and exhaust air 9000 gal liquid nitrogen storage tank, 400 gal liquid oxygen storage toxic and flammable compressed gas delivery and storage area equipment and supplies delivery and staging area

11. 18 September 2001UC Berkeley Microfabrication Laboratory11 Significant Space Allocation

12. 18 September 2001UC Berkeley Microfabrication Laboratory12 Laboratory construction from CITRIS development funds (~44M) Laboratory equipment funding (~50M) corporate equipment donations existing Microlab equipment new funding Detailed tool lists will include: <.25  m photolithography (8”, 6” and manual) in house >1  m minimum feature mask production thin film deposition (furnace, rapid thermal, and plasma) thin film etching (wet etching and plasma) Analysis (CDSEM, TEM, ellipsometry, profilometry, interferometry) MEMs specific (etch release, supercritical drying,capillary self assembly) packaging (electroplating, dicing, wafer/wire/flipchip bonding) Extensive Equipment Requirements

13. 18 September 2001UC Berkeley Microfabrication Laboratory13 Advanced Energy ASML Atmel Corp. Advanced Micro Devices Applied Materials Asyst Technologies Inc. Cymer Etec Systems Inc. Intel Corporation KLA-TENCOR Lam Research Corp. Mykrolis Corp. Nikon Research Corp. Novellus Systems Inc. Silicon Valley Group Schlumberger Tokyo Electron Limited “Small Feature Reproducibility” Group – key potential sponsors for equipping IMF