1. PANalytical K. Bethke, R. de Vries, V. Kogan, J. Vasterink, R. Verbruggen, J. Bethke P. Kidd, P. Fewster PAN Sussex Research 1RECFA Meeting, Sept. 05 RECFA @ NIKHEF Industrial Collaboration: PANalytical Tech-transfer, Applications and new Developments in X-ray Materials Analysis

2. RECFA Meeting, Sept. 05 2 2RECFA Meeting, Sept. 05 Outline Background / Company Medipix Tech-Transfer First highlights on detector properties Expectations for XRD applications New EUREKA project “RELAXD” Conclusions (Relevance of collaborations, funding)

3. RECFA Meeting, Sept. 05 3 3RECFA Meeting, Sept. 05 Main Activities X-ray Diffraction and Fluorescence for Science and Industry Winning by Sharing know-how and experience in X-ray diffraction and fluorescence

4. RECFA Meeting, Sept. 05 4 4RECFA Meeting, Sept. 05 Main Activities XRF (Industry and Research) – Elemental Analysis (qualitative and quantitative) – Applications: Cement, Petrochemical, Plastics, Steel, Aluminium, Environmental, Geology – Automation XRD (Research and Industry) – Phase Analysis (qualitative and quantitative) – Some applications: Pharmaceuticals, Cement, Minerals – Advanced Materials, Thin Films and Semiconductors, Nanotech, – Automation

5. RECFA Meeting, Sept. 05 5 5RECFA Meeting, Sept. 05 Product range XRF (Elemental Analysis) CubiX Axios MiniMate MiniPal 2 Venus MagiX FAST

6. RECFA Meeting, Sept. 05 6 6RECFA Meeting, Sept. 05 (First) Collaboration XR F & D

7. RECFA Meeting, Sept. 05 7 7RECFA Meeting, Sept. 05 Key Modules

8. RECFA Meeting, Sept. 05 8 8RECFA Meeting, Sept. 05 XRD: X’Pert PRO MRD Advanced X-ray analysis for new materials research and development For thin films, semiconductors and microstructures, nano-research

9. RECFA Meeting, Sept. 05 9 9RECFA Meeting, Sept. 05 X’Pert PRO MRD XL X-ray analysis for research and process development of advanced materials Analysis of wafers up to 300 mm diameter Automatic wafer loading

10. RECFA Meeting, Sept. 05 10 10RECFA Meeting, Sept. 05 X’Pert PRO MRD XL X-ray analysis for research and process development of advanced materials Analysis of wafers up to 300 mm diameter Automatic wafer loading

11. RECFA Meeting, Sept. 05 11 11RECFA Meeting, Sept. 05 X’Celerator The standard in X-ray powder diffraction Speed and resolution Rapid data collection of complete powder diffractograms

12. RECFA Meeting, Sept. 05 12 12RECFA Meeting, Sept. 05 CSI MIAMI FORENSIC SCIENCE

13. RECFA Meeting, Sept. 05 13 13RECFA Meeting, Sept. 05 Outline Background Medipix Tech-Transfer First results on detector properties Expectations for XRD applications First results of Medipix in XRD New EUREKA project “RELAXD” Conclusions

14. PANalytical K. Bethke, R. de Vries, V. Kogan, J. Vasterink, R. Verbruggen, J. Bethke P. Kidd, P. Fewster PAN Sussex Research 14RECFA Meeting, Sept. 05 Acknowledgement NIKHEF team Jan Visschers Hans Verkooijen, Ton Boerkamp CERN team Michael Campbell Xavier Llopart Erik Heijne CERN ETT Marilena Streit-Bianchi Beatrice Bressan Ministry EZ / Netherlands Leader Medipix group @ NIKHEF + partnership new RELAXD project Chip design Spokesman Medipix coll. Tech-transfer Office +combined exhibitions IEEE/Rome, Salon Paris Funding RELAXD IS 051 010

15. RECFA Meeting, Sept. 05 15 15RECFA Meeting, Sept. 05 PARIS: Salon de la Recherche et l’Innovation

16. RECFA Meeting, Sept. 05 16 16RECFA Meeting, Sept. 05 Medipix Collaboration - Univ + INFN Cagliari - CEA-LIST Saclay - CERN Genève - Univ d'Auvergne - Univ Erlangen - ESRF Grenoble - Univ Freiburg - Univ Glasgow - IFAE Barcelona - Mitthoegskolan Sundsvall - MRC-LMB Cambridge - Univ + INFN Napoli - NIKHEF Amsterdam - Univ + INFN Pisa - FZU CAS Prague - IEAP CTU Prague - SSL Berkeley Spokespersons: Michael CAMPBELL CERN Jan VISSCHERS NIKHEF

17. RECFA Meeting, Sept. 05 17 17RECFA Meeting, Sept. 05 Medipix 2 chip / detector

18. RECFA Meeting, Sept. 05 18 18RECFA Meeting, Sept. 05 Comparison with state-of-art detectors

19. RECFA Meeting, Sept. 05 19 19RECFA Meeting, Sept. 05 First shot: direct beam

20. RECFA Meeting, Sept. 05 20 20RECFA Meeting, Sept. 05 Direct beam Linear scaleLogarithmic scale

21. RECFA Meeting, Sept. 05 21 21RECFA Meeting, Sept. 05 R&D: Medipix collaboration - PANalytical

22. RECFA Meeting, Sept. 05 22 22RECFA Meeting, Sept. 05 Micro–high-resolution wafer mapping “Static” measurement geometry for wafer screening of CdHgTe diode arrays for thermal imaging cameras Linear array Si Strip detector Discrimination on every photon separates very weak scattering from random noise in measurement Signal peak gets enhanced with counting time Random residual noise statistically cancels with counting time Results in an enhanced dynamic range Signal peak <0.25 photons/s Background noise after 100 s count time ~0.005 photons/s Single 100  m sampled region X-rays

23. RECFA Meeting, Sept. 05 23 23RECFA Meeting, Sept. 05 Still weaker signals; very small residual noise Signal peak ~0.06 photons/s Background after 100 s count time <0.001 photons/s Signal peak ~0.1 photons/s Background after 100 s count time <0.002 photons/s Single 50  m sampled region

24. RECFA Meeting, Sept. 05 24 24RECFA Meeting, Sept. 05 Outline Background Medipix Tech-Transfer First results on detector properties Expectations for XRD applications First results of Medipix in XRD New EUREKA project “RELAXD” Conclusions

25. RECFA Meeting, Sept. 05 25 25RECFA Meeting, Sept. 05 High REsolution Large Area X-ray Detector Fully tiled X-ray imager need pitch adapter Gbit/s serial readout Innovation Project Funded RELAXD

26. RECFA Meeting, Sept. 05 26 26RECFA Meeting, Sept. 05 RELAXD Consortium CANBERRA Olen, Belgium IMECLeuven, Belgium NIKHEF Amsterdam, Netherlands PANalytical as Penholder: Almelo, Netherlands RELAXD Partners

27. RECFA Meeting, Sept. 05 27 27RECFA Meeting, Sept. 05 The Future: Medipix2 tiling through-via etching wafer thinning 3D stacking

28. RECFA Meeting, Sept. 05 28 28RECFA Meeting, Sept. 05 Cost & Subsidy – 2690 kE total project ========================================== – 1138 kE PAN 60% funding=> 683 kE EZ – 922 kE NIKHEF => 553 kE EZ ========================================== – 633 kE CANBERRA ~50% funding => 331 kE IWT – 0 IMEC funded by CAN mainly and also by PAN ========================================== – Status: approved in NL, already started since Sept 1 st in the approval phase in Belgium Jan ‘06 Eureka labelling Financials / Funding of RELAXD

29. RECFA Meeting, Sept. 05 29 29RECFA Meeting, Sept. 05 Relevance: PAN Detector Center Medipix 2 CERN Detector chip production CMOS process (0.25  m) Medipix +, ++ Plus spin-offs 0.13 mu, 0.09 mu CMOS ….Super-chip, >RELIABLE< PANalytical NIKHEF CANBERRA IMEC PANalytical (+Canberra) (MCNC) Large® area Meaning of RELAXD Pixel intelligence Various shapes&sizes

30. RECFA Meeting, Sept. 05 30 30RECFA Meeting, Sept. 05 Observations to R & I & G (Research / Industry / Government) Relevance of Collaborations R&I – Developments of high degree of complexity – high-tech products only possible together (good tech-transfer) – Money reflow into the special research groups – Spin-off activities improve processes in e.g. yield, stability, and performance of devices (with input from both, R&I) portunity Conclusions

31. RECFA Meeting, Sept. 05 31 31RECFA Meeting, Sept. 05 Observations to R & I & G (Research / Industry / Government) Relevance of Funding – Financial means of both, R&(medium sized) I, are limited – Order of millions for a R&D project requires involvement of funding – Improve compatitive strength of Europe – Enabling technologies are essential and contribute to the benefit for the society portunity Conclusions cont.