1. Silicon sensor module production for PHENIX FOCAL S.H. Lim Yonsei University

2. Contents Introduction –PHENIX FOCAL –Silicon pad sensor Micro-module production –Components & Structure –Wafer dicing –Gluing process –Results Summary & Outlook 2 Yonsei Nuclear Physics Lab.

3. Contents 3 Yonsei Nuclear Physics Lab.

4. PHENIX FOCAL Yonsei Nuclear Physics Lab. 4

5. Silicon pad sensor Yonsei Nuclear Physics Lab. 5 ground -

6. pn Sensor operation Yonsei Nuclear Physics Lab. 6 ground - - + ++ + + + + + ++ -- - - - - -- - Depletion Region PN diode

7. Leakage current IV measurement data Yonsei Nuclear Physics Lab. 7

8. Contents 8 Yonsei Nuclear Physics Lab.

9. Micro-module schematics Yonsei Nuclear Physics Lab. 9

10. Components for micro-module Yonsei Nuclear Physics Lab. 10

11. Wafer Dicing Yonsei Nuclear Physics Lab. 11

12. IV characteristics after dicing Yonsei Nuclear Physics Lab. 12

13. Gluing Process Gluing process –3 Steps –1 day for each step Yonsei Nuclear Physics Lab. 13 2nd 1st 3rd

14. Glue properties Yonsei Nuclear Physics Lab. 14 AralditeKE45CW2400 CompanyHUNTSMAN(Swiss)ShinEtsu(Japan)CircuitWorks(USA) MaterialEpoxy Silicone Rubber Compound Silver epoxy Color / appearance Creamy liquid Amber liquid White paste Bright silver Gray silver Specific gravity 1.17 /Resin 0.92 /Hardener 1.052.85 Feature

15. Production results 4 sample micro-module production has completed. Mechanical and electrical issues have been checked Yonsei Nuclear Physics Lab. 15

16. IV characteristics after gluing Yonsei Nuclear Physics Lab. 16

17. Contents 17 Yonsei Nuclear Physics Lab.

18. Summary & Outlook Yonsei Nuclear Physics Lab. 18

19. THE END THANK YOU