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Institute of Physics ASCR, Prague Strip Sensors R&D for SCT and ITk Marcela Mikeštíková
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Institute of Physics for ATLAS SCT: sensors 1.Participation in R&D of strip sensors p-on-n for SCT 2. Study of radiation hardness of first prototypes 3.Qualification tests of strip sensors for SCT 2500 sensors tested in total (16% of whole production of discs sensors) in SCT lab of IP ASCR Prague Automatic probe-station in SCT lab of IP ASCR, Prague Prague SCT Lab Detail of disc sensor 2
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1.Evaluation of large area n-on-p silicon strip sensors 2009: Study of electrical characteristics of design ATLAS07 large area (10x10cm) sensors at Prague SCT lab J. Bohm, M. Mikestikova, A. Affolder, P.P. Allport, … Z. Dolezal, P.Kodyš, et al. NIM A636 (2011) S104-S110 3 Interstrip Capacitance -bias voltage scan Interstrip capacitance – strip scan Institute of Physics for ATLAS Upgrade ITk – strip sensors Bias Voltage scans (IV, CV, Cint, Rint) Full strip scans (automatic probe station) Interstrip Capacitance and Resistance AC Coupling Capacitance Polysilicon Bias Resistance Leakage Current to a strip ATLAS07
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2. Study of radiation damage of ATLAS07 and ATLAS12 strip sensors Samples: miniature (1x1cm) sensors n-strip in p-type material (FZ) Barrel and Endcap mini sensors : different layouts, pitches, types of stray strip ganging and types of PTP structures Irradiation: protons (up to 2E15 n eq /cm 2 ): CERN, Birminham, Karlsruhe, CYRIC neutrons : from reactors in Řež (Prague), Ljubljana gamma (up to dose 10MRad): BNL Studies IV (Current, Break down voltage), CV (Full depletion voltage) Surface radiation damage: Interstrip Resistance and Capacitance Punch Trough Protection Structure (Beam loss protection) AC Coupling Capacitance Polysilicon Bias Resistance Measurements condition: probe station with cooled chuck (up to -30°C) with Nitrogen flow, rel. humidity <5% 4 Institute of Physics for ATLAS Upgrade ITk
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Laboratory Equipment of Silicon Lab in IP ASCR Prague For Quality Assurance - Sensors tests 5 Silicon Lab (24 m 2 ) - with temperature and humidity control, vertical air flow, - electrically conductive flooring
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Laboratory Equipment of Silicon Lab in IP ASCR Prague For Quality Assurance - Sensors tests 6 Manual probe station with cooled chuck (-30°C) Nitrogen flow in probe station, humidity < 5% Automatic probe station KarlSuss PA200 equipped with probe heads with vacuum and magnetic support, microscope, video camera and monitor - for strip integrity tests and for visual inspection Measuring devices: LCR meter HP4284A SMU Keithley 237 HP34401A multimeter Picoammeter Keithley 487 Electometer K6517A HV Supply K248 up to 3000V Switching system 4x5 Matrix Switch Clean storage cabinet with Nitrogen purge for ~200 sensors
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clean room (6m 2 ) level 10 000 - temperature and humidity control, overpressure Laboratory Equipment in IP ASCR Prague BINDER: Environmental simulation chamber for cyclical temperature (-40°+180°C) Flowbox with HEPA filters 7
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Backup
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Step NoName & DeceptionEquipment NeededQA Specs 1Arrival Unpacking? Storage of components Storage Cabinets (if not packaged) Humidity <5% 2Visual Inspection Check for scratches, broken edges, dust etc. Check edge chip spec: no chips or cracks Optical Microscope with automated inspection software ‘Nice and Clean sensor’ 3Metrology Survey XY geometry Z profile Optical (non contact) CMM Total Bow <200 m 4aI-V Probe Station with N 2 /humidity control/chiller Sensor held on jig using clamps (not vac) in dry conditions (N 2 ) 0-800V in 10v steps with 10s interval I < 200 A (as spec) No onset of micro-disharge T = Normalised to 20 o C 4bC-VAs Above0-800V in 10v steps with 5s interval T = Normalised to 20 o C 9 1 - Sensors (Bart + Kristin) ITK Week - Feb 2015Andy Blue Quality assurance - Lab requirements
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Step No Name & DeceptionEquipment NeededQA Specs 5aFull Strip Test Probe Station Multichannel probe card Starts at 5-10% Reduce to 1-2% 5bAdditional Tests PTP, C INT, R INT Probe StationSame sensors as 5a 7Database Sensor is registered Data uploaded PC / Laptop 8Decision Grading of Sensor is made Good, Pass, Hold or Fail 10 1 - Sensors (Bart + Kristin) Andy BlueITK Week - Feb 2015 Quality assurance - Lab requirements
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