1. ENERGY MANUFACTURING Prof. Burak Ozdoganlar, Associate Professor Department of Mechanical Engineering Department of Materials Science and Engineering Carnegie Mellon University

2. © 2007-2008 O. Burak Ozdoganlar What is Micromachining?  Mechanical Micromachining  Micromilling, Microdrilling  An emerging micro-manufacturing technique  Machining features with characteristic dimensions less than 1 mm (0.040 in) Usually less than 500 micron (0.020 in) in diameter (tools in milling and drilling)

3. © 2007-2008 O. Burak Ozdoganlar 3-axis Precision Slides Kistler ® Miniature Dynamometer Spindle IR Speed Measurement Workpiece Micro End-Mill 160,000 rpm air-bearing, air- turbine spindle Linear Motor Actuated Slides with 10 nm precision High-Speed Camera Microscope Multiscale Manufacturing and Dynamics Laboratory at Carnegie Mellon University

4. © 2007-2008 O. Burak Ozdoganlar Micromachined Parts from MMDL Aluminum 7075 Steel Naval Brass Copper Stainless Steel PMMA Natural Polymer

5. © 2007-2008 O. Burak Ozdoganlar Micromachined Parts from MMDL (Cont’d)  Polymer and metal pillars and pyramids

6. © 2007-2008 O. Burak Ozdoganlar Energy Systems  Would smaller ones makes sense in terms of efficiency?  Specific Challenge  Large-area micro-featured structures (e.g., stamping and rolling dies)  Ideas for Meeting the Challenge  Systems approach to micro-manufacturing