1. An Introduction to SIMS and the MiniSIMS alpha
© Millbrook Instruments Limited Blackburn, UK

2. Secondary Ion Mass Spectrometry (SIMS) & The Millbrook MiniSIMS

3. The SIMS Process simulation courtesy of Dr Postawa Zbigniew
at the Jagiellonian University in Poland

4. A Conventional SIMS System

5. The MiniSIMS Instrument

6. Design Objectives Increase routine use of Surface Analysis
more affordable
more accessible
Not a replacement for conventional SIMS
not state-of-the-art performance
restricted analysis conditions

7. Transform one of these …..

8. ….. into one of these.

9. Operational Strengths
Low Capital & Running Costs
Fast, On-Site Analysis
Compact Design, Single Electrical Supply
Full Automation & Control for Ease of Use
High Reliability
Rapid Sample Throughput
Simplified Data Interpretation
Remote Control via Internet

10. Static SIMS (Surface Analysis)

11. Static SIMS (Surface Analysis)

12. Characterisation of Layer
Structurally significant peaks

13. Characterisation of Layer
Structurally significant peaks

14. Light Element Detection

15. Dynamic SIMS (Depth Analysis)

16. Dynamic SIMS (Depth Analysis)

17. Before Annealing

18. Copper has diffused into silicon oxide
After Annealing
Copper has diffused into silicon oxide

19. Profile Before Annealing

20. Profile After Annealing

21. Imaging SIMS (Spatial Analysis)

22. Imaging SIMS (Spatial Analysis)

23. Distribution of Organic Film
Incomplete coverage of both organic and inorganic components in a battery electrode
CxHyOz- (blue) and Li+(red) on Al+ (green)
Image size mm x 4.5 mm

24. Distribution of Metal Overlayer
Uneven coverage of the silver coating on the contacts of a semiconductor connection frame
Cu+ (red) and Ag+ (green)
Image size mm x 3.0 mm

25. Typical Applications for the MiniSIMS alpha
Repetitive analysis (quality monitoring)
Large area organic surface contamination
Fast imaging of millimetre scale areas
3 dimensional analysis of multi-layer structures
Comparative rather than quantitative analysis

26. Typical Application Areas
Surface Coatings
Surface Treatments
Electronic Components
Semiconductors
Electrodes & Sensors
Catalysts
Adhesives
Lubricants
Packaging Materials
Corrosion Studies

27. Alternatives to a MiniSIMS ?
No Other Benchtop SIMS Instrument
Conventional SIMS Systems
much more complex and expensive
Contract Analysis Laboratories
not convenient, contamination during transport
Other Surface Analysis Techniques
generally less sensitive

28. Comparison of SEM / EDS and SIMS

29. Advantages of SEM / EDS High magnification physical image
Quantitative elemental information

30. Advantages of SIMS Surface specific analysis
Organic structure identification
Profiling for depth distribution
Light element detection

31. EDX sampling depth is typically 1 micron
For many applications surface sensitivity is needed…
509 m
Not 100 x
Not 10 x
But 1000 x – SIMS can offer true surface analysis
EDX sampling depth is typically 1 micron

32. Conclusions SIMS & EDS give complementary information
SIMS has advantages for
Organic surface contamination
3 dimensional analysis of multi-layer structures
SEM / EDS has advantages for
High magnification physical imaging
Quantitative analysis

33. Summary
A summary of the presentation on the TOF option for the MiniSIMS

34. MiniSIMS Summary
SIMS is a powerful technique for the 3-D analysis of the surfaces of materials and thin films
Information easily available by SIMS may be difficult or impossible by any other technique
SIMS is especially valuable for the detection of:-
organic species (e.g. silicones, fluorocarbons)
light elements (lithium, beryllium, boron …)
group IA & IIA metals, group VII halides

35. MiniSIMS Summary
SIMS is a fast analysis technique, especially for imaging applications
MiniSIMS alpha is most applicable for running routine repetitive analyses
Desktop MiniSIMS means SIMS is now affordable and accessible to all