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Shamil Baldeosingh Dasney Joseph Walter McKinley March 4 th, 2010 EML 4905 Senior Design Project Advisor: Dr. K. H. Wu March 24, 2010 1
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Background Problem Statement Design Specifications Conceptual Designs Project Management Future Plans 2
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Chemical Vapor Deposition ( CVD ) Widely used for engineering applications Scalable to industrial production 20-100 % yield Controllable parameters to determine properties 3
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Large Research Interest Properties Mechanical Electrical Thermal Novel Applications Variations Dimensions and Geometry Quality and Yield Zhao et al., Physical Review Letters,Physical Review Letters 4
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CNT synthesis for current CVD system 3 hours for sample size of 1 – 5 grams ▪ Furnace heating of entire reaction chamber ▪ Such a large sample size is not necessary for research CNT synthesis for proposed CVD system 0.5 hours for sample size of less than 1 gram ▪ Localized heating of gases and substrate ▪ Appropriate for research applications 5
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Preheated Gas Temperature At least 400 ̊c Substrate Temperature 600-1000 ̊c 6
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Packaging Accessibility Substrate should be easily loaded Maintenance of system Gas flow Reynolds number << 2100 : Laminar Flow Peclet number << 1 Knudsen number > 1 7
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Design A Straight Tube Design B Variable Cross Section Tube Design C Cube Packaging 441 Accessibility 551 Gas Flow 324 Price 125 Excellent – 1Very Good -2 Good – 3Fair – 4Poor - 5 11
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Substrate Material Wafer Powder Resistive Heating Element Material Configurations Life span Thermal Strength Thermal Shock Thermal Expansion Deflection Power Input AC vs. DC H-Current/ L-Voltage L-Voltage/H-Current 12
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Heat Generation Dasney Joseph Instrumentation and Fluid Mechanics Shamil Baldeosingh Conceptual Designs and Prototype Walter McKinley 13
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Gantt Chart -Spring 2010 14
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Design Modeling SolidWorks Simulation ANSYS CFX ▪ Fluid Mechanics ▪ Heat Transfer from Resistive Heating Elements Instrumentation and Control LabVIEW Thermocouple Infrared Temperature Sensor Mass Flow Controller Prototype Testing Scanning Electron Microscope ( SEM ) ▪ Verify growth of CNT’s 17
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Dr. Wu ( Florida International University ) Amit Datye ( Oak Ridge National Laboratory ) John Hart ( Massachusetts Institute of Technology ) 18
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