1. Ceramic Servo Motors

2. Traditional Piezo VS Reversed Piezo VS Ultrasonic Standing Wave
Theory Of Operation
Traditional Piezo VS
Reversed Piezo VS
Ultrasonic Standing Wave

3. Piezo Direct and Reverse Effect

4. Poling a Piezo Element

5. Basic Structure of Nanomotion’s Piezoelectric Element

6. Ultrasonic Standing Waves
Bending Mode
Longitudinal Mode
Simultaneous excitation of both modes
creates motion at the edge of motor fingertip
Slide + =

7. Finite Element Simulation Longitudinal Mode Bending Mode

8. Motor Ellipse Amplitude of ellipse varies with voltage
Slow speed – ellipse at the few nm level
High speed- ellipse at the tens of microns
The larger the ellipse, the more the mechanical stress, the more the heat, the less the duty cycle

9. Nanomotion Motor Basics
Linear Stage
PZT
Rotary Table
PZT
Linear Motion Rotary Motion

10. Motor Assembly

12. Motor Features Standard motors for most operating environments
Unlimited travel with small operating package (Drive strips to 4m length)
Superior move & settle & Slow speed CV
Vacuum motors for high and UHV
Up to Torr
Non-Magnetic motors / No EMI from motor
No servo dither & no hysteresis
Built in holding / braking without power consumption
Wide range of dynamic performance (Resolution to 1nm, velocity from 1u/sec to 300mm/sec)
Cost effective direct drive solution

13. New ‘high volume’ industrial motor.
The “EDGE”
New ‘high volume’ industrial motor.
Low voltage
Supported by ASIC based driver
Low price in volume
Performance Characteristics
Max velocity: 150mm/sec
Max force: 30g (.3N)
Highest resolution: 1um
Requires straight slide (to 10um)

14. The “EDGE” Drive System Market Positioning
The Edge is supported by a dual axis ASIC
2 independent drive/control or one drive for (2) motors.
ASIC is a complete drive + simple control, programmed via I2C protocol. Can close the loop at 5um resolution (30k counts/sec)
ASIC drive available with +/-10vdc input for use with external servo controller.
Market Positioning
Mid to high volume industrial markets
Biomedical: Pumps, biometric security, Drug delivery
Military/Aerospace: Aperture control, shutters, target manipulation
Vision: Industrial focus/zoom

15. The “EDGE” Benefit / Feature Target Applications
SIZE: Smallest closed loop servo motor
SAFETY: Low voltage for medical applications
POWER: .3N force
COST: Low price in volume
Target Applications
Aperture/Shutter control (vision, laser, etc)
Medical devices (pumps, wands, fluid control)
Vision/Industrial focus/zoom

16. DuraMotor Next Generation Motor by Nanomotion
For Better Productivity and Cleanliness
at Challenging Motion Conditions

17. DuraMotor Introduction
Critical factor definition in vacuum environment
Operating Conditions
Experimental results and analysis
Summary and conclusions
Design recommendations

18. Introduction
Nanomotion products are serving a wide range of applications
Challenging applications are often involved with high cleanliness requirements
Semiconductor, FPD, data storage, high resolution microscopy
Medical, military, and Nanotech applications with analytical instruments
Main factors impacting performance at the above conditions
Stage stiffness
Motion dynamics
Vacuum VS Ambient environment
Control optimization
DuraMotor was designed for
Operation at challenging motion environments to achieve HIGH PRODUCTIVITY
High dynamics – acceleration, velocity
Vacuum environment
High duty cycle
Full compatibility with the HR motor family
Seamless integration with existing servo or open loop systems
DuraMotor was designed for high productivity stage by allowing extreme dynamics (speed and acceleration) at high motion performance without compromising on particle.

19. Critical Factor Definition at Vacuum applications Experimental Comparison for Standard HR Motors
In this phase we have screened the relevant parameters and mapped the critical factors for our specific experiments (see TESTED OPERATIONAL CONDITIONS foil)
Stage Stiffness and Motion Dynamics are the Critical Factors

20. Design Recommendation
DuraMotor is recommended for challenging vacuum and ambient applications
High stiffness stage is the most critical factor for the motor performance with low particles level
Servo parameter optimization is essential to avoid vibrations which contribute to particles during dynamic move profiles
Both HR and DuraMotor are suitable to use at high stiffness and well controlled servo systems
A stiff stage design with DuraMotor allows for
high productivity (dynamics) and cleanliness in motion systems

21. DuraMotor Benefit / Feature Target Applications
CLEANLINESS: Reduced particle generation
DURABILITY: Higher accel rates, more aggressive move profiles.
Target Applications
Semiconductor vacuum stages for wafer inspection, E-beam & Ion beam microscopes
XY & Z motion for medical microscopes
Any application that is sensitive to contamination

22. The “Flex DC”

23. Product Configuration
Flex DC
Product Configuration
Single Axis (AB1A or AB5)
Dual Axis (AB1A, AB5, or Mixed)
8 kHz Servo Update Rate
DAC Output +/-10v, 16 bit
Easy to use GUI
RS232, Ethernet, and CAN-open interface
Quadrature Encoder input
Sin/Cosine Multiplier Option

24. Flex DC Hardware I/O AC Input (wall) 8 x Digital Isolated Inputs
2 x Digital Isolated Outputs
2 x Digital Fast Inputs
2 x Digital Fast Outputs
AC Input (wall)
100 – 240 VAC, Hz

25. PID or PIV Control Algorithm Data Recording Nanomotion Algorithms for:
Flex DC Software
PID or PIV Control Algorithm
Data Recording
Nanomotion Algorithms for:
Deadband
Ultra-High Resolution Positioning
Thermal Protection (to come)

26. Flex DC
Board level dual axis option
Board level 4 axis option
Rack mounted box with 4 axis (TBD)

27. Flex DC Benefit / Feature Target Applications
SINGLE RESPONSIBLITY: Eliminating all the guess work of interfacing drives & controls
EASE OF USE: Simple front end GUI and strong factory support (from Nanomotion)
PLUG & PLAY: Set up for any FB motor and encoder to plug directly into the controller
COMMUNICATIONS: RS232, Ethernet, CAN-Open
Target Applications
EVERY FB or CUSTOM STAGE CUSTOMER (you will not sell many of these without our motors. It is a support product.

28. Stages
Nanomotion continues to expand its offering of standard stages and custom motion systems to be a provider of complete motion solutions.

29. “Nanomotion” Standard Stages
FB Linear Stages
Sizes: 50mm to 150mm wide
Travels: up to 300mm
Resolutions: 1um to 10nm
Single and multi axis
FBR Rotary Stages
60mm output diameter
(150mm diameter available)
Resolution of 5 to 0.5 arc seconds
Single or multiple HR2 motors

30. Custom Motion Systems
Nanomotion’s first “hybrid” motion platform, combining two axis of Nanomotion motors with one axis of ballscrew and step motor drive.

31. Custom & Semi-Standard Motion Systems
Motion systems that utilize standard components of bearings, slides and encoders, but require custom machined assembly housings creates distinction in the market place.

32. Custom Drive Electronics
Nanomotion has designed and manufactured many custom drive configurations for customer applications.
Small multi axis amplifiers
4 channel card for HR1 motors
Miniature amplifiers with TTL inputs
To drive ST or MM motors
Nanomotion will look to standardize an offering of smaller electronics (based on motor sizes).
Do not let electronics packaging be an obstacle to developing an application.

33. Drive Technology Comparison

34. Drive Technology Comparison
2 Piece Construction
?? Piece Construction

35. Drive Technology Comparison
Nanomotion positions its ceramic servo motors against other applications using step or servo motors or stages with closed loop rotary step or servo motors (using ball/lead screw) or brushless linear servo motors.

36. Positioning with respect to other motion technologies
Motor
Drive
Feedback
Configuration
Step Motor
Lead/ball screw
None
Open Loop
Rotary Encoder
Closed Loop
Servo Motor
Linear Encoder
Ceramic Servo Motor
DC Linear Servo Motor

37. Drive Technology ComparisonVS

38. Performance Comparison
Travel
Accuracy / Repeatability
Velocity
Accel / Decel
Load
Dynamic/Static Stiffness
Smoothness of Motion
Control Interface
Special Environments
Cost

39. Travel Comparison
Travel can be configured for any length in both systems
Once ballscrew length is defined, travel is fixed
Ballscrew has length limitations by diameter and bearing span
Nanomotion can travel any length defined by bearing structure
Advantage: Ceramic Servo Motors

40. Accuracy / Repeatability Comparison
Nanomotion relies on direct feedback on the motion platform and does NOT induce any potential errors from mounting or compliance.
Ballscrews can use either linear or rotary encoders which can introduce errors related to lead error, screw mounting, or compliance.
Ceramic servo motors have no negative effects with respect to accuracy and work to the limit of the feedback.
Advantage: Ceramic Servo Motors

41. Velocity Comparison
While ballscrews are limited by the pitch and critical speed, based on mounting, Nanomotion’s motor technology is limited to 250mm/sec.
High pitch ballscrews can go much faster
Advantage: Ballscrews & Rotary Motor for Speed
However, Nanomotion has a significantly higher bandwidth in velocity, with a ratio of 1:250,000
Advantage: Ceramic Servo Motors for Range

42. Accel /Decel Comparison
In terms of pure acceleration, Nanomotion has achieved rates in excess of 10g’s.
Ballscrews have a practical limit of ~1g, before balls start jamming in the return tubes.
While ceramic servo motors can achieve a high rate, it is very load dependent.
Advantage: Shared / Application Dependent

43. Load Comparison
While ceramic servo motors are competitive within the defined speed/force curves, the mechanical advantage of the ballscrew is much greater than the force capability of our direct drive.
Advantage: Ballscrew & Rotary Motor

44. Dynamic Stiffness Comparison
Dynamic stiffness is a function of the motor response, control loop, and mechanical system.
The compliance in a rotary motor – coupling- bearing mount- ballscrew creates a much slower response.
The direct drive of a motor coupled to the load, without any internal motor inertia, makes ceramic servo motors a much faster responding technology
Advantage: Ceramic Servo Motors

45. Static Stiffness Comparison
The static stiffness of the ballscrew can be significantly higher that the ceramic servo motors.
However, it is dependent on the shaft bearing configuration and type and ball nut preload.
Advantage: Ballscrew & Rotary Motor

46. Smoothness Comparison
The impact of ball bearings running in/out of preload creates vibration that will be transmitted to the mechanical structure.
The issues of ball screw pitch diameter variations and preload variations create torque fluctuations that will effect smoothness of travel.
Ceramic servo motors do not effect the bearing structure and can travel smoothly at the level of 1 micron/sec.
Advantage: Ceramic Servo Motors

47. Control Interface Comparison
Most rotary servo motors and amplifiers have the ability to accept step/direction inputs as well as analog inputs
Nanomotion amplifiers are limited:
+/-10 vdc analog input
SPI digital input
However, the new AB5 allows use with ANY controller that provides +/-10 vdc, including PLC’s
Advantage: Ballscrew & Rotary Motor

48. Special Environment Comparison
Nanomotion’s ceramic servo motors are well suited to:
Vacuum & UHV
High Magnetic Field
Clean Room
Radiation
High RF
Rotary motors with ballscrews (and lubricants) are far more limited
Advantage: Ceramic Servo Motors

49. Comparison Summary Characteristic Advantage Travel Nanomotion
Accuracy/Repeatability
Velocity
Max Speed –Ballscrew
Bandwidth -Nanomotion
Accel / Decel
Even
Load
Ballscrew
Dynamic Stiffness
Static Stiffness
Smoothness
Control Interface
Special Environments
Cost

50. Comparison Summary
Ceramic Servo Motors bring advantages in size, simplicity, force per volume, dynamic performance, and cost over traditional drive technology.