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Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems.

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Presentation on theme: "Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems."— Presentation transcript:

1 Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems Introduction to IMM – Bologna Istitute for Microelectronics and Microsystems G.C. Cardinali cardinali@bo.imm.cnr.it

2 Materials and Processes for Microelectronics and Microsystems Sensors and microsystems Diagnostic and Characterization Techniques for Materials and Devices Photovoltaic and optoelectronic devices CNR - IMM Bo Research Activities

3 Main Technological Equipments and Facilities

4

5 Sensors and Microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes

6 Sensors and Microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles

7 Sensors and Microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors 22 Febbraio 2013

8 Sensors and Microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors Chemical sensors Chemical sensors Micromachined gas sensors Micromachined gas sensors Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors Chemical sensors Chemical sensors Micromachined gas sensors Micromachined gas sensors

9 Sensors and Microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors Chemical sensors Chemical sensors Micromachined gas sensors Micromachined gas sensors Gas chromatographics (GC) microsystems Gas chromatographics (GC) microsystems Physical transducers Physical transducers Single Photon Avalanche Diodes Single Photon Avalanche Diodes Bolometers, thermopiles Bolometers, thermopiles Strain sensors Strain sensors Chemical sensors Chemical sensors Micromachined gas sensors Micromachined gas sensors Gas chromatographics (GC) microsystems Gas chromatographics (GC) microsystems

10 Sensors and Microsystems Silicon nanowires: thermoelectric transducers

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