1. Piezo-Ceramic Servo Motors

2. Linear, Rotary or Spherical Motion

3. Agenda Corporate Overview Theory of Operation Product Features
Applications
Question / Answer

4. Corporate Introduction
Nanomotion
Established in 1992 for the design, manufacture and marketing of piezo-ceramic motors and electronics (for linear and rotary motion)
Subsidiary of Johnson Electric ($2.5B, 38,000 employees, 3 million motors/day)
Saia Burges (step motors, switches, solenoids)
Nihon Mini Motor (step & dc motors for camera & dvd)
Parlex (flex circuits and contract mfg)
Nanomotion is 65 people with ~35% in the engineering and R&D.
>75,000 motors in field
>10,000 linear axes in the field
>Shipping 700k motors in 2008, for cell phone auto focus

5. Nanomotion Theory of Operation Traditional Piezo VS Reversed Piezo VS
Standing Wave

6. Piezo Direct and Reverse Effect

7. Poling a Piezo Element

8. Basic Structure of Nanomotion’s Piezoelectric Element

9. Nanomotion Motor Basics Ultrasonic Standing Waves
Bending Mode
Longitudinal Mode
Simultaneous excitation of both modes
Creates motion at the tip of the motor finger
PZT Element
Slide + =

10. Finite Element Simulation Longitudinal Mode Bending Mode

11. “Ultrasonic Standing Wave”

12. Motor Ellipse Amplitude of ellipse varies with voltage
Slow speed – ellipse at the few nm level
High speed- ellipse at the tens of microns
The larger the ellipse, the more the mechanical stress, the more the heat, the less the duty cycle

13. Nanomotion Motor Basics
Linear Stage
PZT
Rotary Table
PZT
Linear Motion Rotary Motion

14. Same Motor for Linear or Rotary Motion

15. Motor Assembly

17. Motor Features Standard motors for most operating environments
Unlimited travel with small operating package (Drive strips to 4m length)
Superior move & settle & Slow speed CV
Vacuum motors for high and UHV
Up to Torr
Non-Magnetic motors / No EMI from motor
No servo dither & no hysteresis
Built in holding / braking without power consumption
Wide range of dynamic performance
(Resolution to 1nm, velocity from 1u/sec to 300mm/sec)
Cost effective direct drive solution

18. Nanomotion Applications

19. Edge Motor & ASIC for Optical Image Stabilization

20. ‘High volume’ industrial motor.
The “EDGE”
‘High volume’ industrial motor.
Low voltage
Supported by ASIC based driver
Low price in volume
Performance Characteristics
Max velocity: 150mm/sec
Max force: 30g (.3N)
Highest resolution: 1um
Requires straight slide (to 10um)

21. Nanomotion Applications
Bio-Medical/Pharmaceutical
Instrumentation
Microscopy
Hand-held devices and tools (pumps, endoscopes)
Military/Security
Aperture/Shutter Control
Auto Focus
Pan & Tilt
Semiconductor
SEM & ION beam
Wafer Metrology
Storage media
Metrology and Assembly Automation
Consumer Products (cell phone, digital camera)

22. Nanomotion Solution

23. ION Beam Etching of MEMs
4 Axis (X/Y/Z/T)
Vacuum Rated
Low Magnetic Field
(VN motors, SS Bearings)
Spring Counterbalance in Z
Resolution of 100nm (available to 10nm)

24. Multi Axis X Ray Inspection System
2Axis (X/Y)
X-Ray Inspection
(radiation environment)
Demonstrated ability to use vibration cancellation with AB2/DC Mode.

25. Multi Axis Stage 3 Axis (X/Z/T)
Laser assisted – Chemical Micromachining for Semicon & Biomedical applications.

26. 6 Axis Hexapod Travel in XYZ + Pitch/Roll/Theta
Parallel Kinematics eliminating stacked axis errors
Equal stiffness in all directions

27. Biomedical Application Base
Cell Imaging (Cytopathology, Gene/DNA analysis)
Microscopes
Hand held imaging tools
Surgical Robots & Manipulators (MRI compatible)
Microfluidics (drug discovery & development)
Pumps & Micro Pumps
Proteomics & Dispensing
End User Device Manufacturing (Angioplasty balloons, implant devices)

28. Virtual Microscopy: Scan on-the-fly
Digitized entire microscope slide with line scan operation
Motion system resolution to 50nm
X: Index Axis
Y: Scan Axis
Z: Auto Focus Axis
Constant Velocity for scanning and integrated Z axis for managing Cell Terrain
Table Top Machine

29. Cell Imaging: Move & Settle
Rapid scan & locates 22 areas of interest (field of view) with step and repeat motion
Slide imaged in 4 min/ 360 slides per day.
Improve Sensitivity & Specificity (false positive)

30. Multi Layer Tissue Imaging
Cross sectional imaging for women’s health
Lower cost diagnosis than pap smear and can be made widely available to under developed countries.
Miniature motion system to move lenses inside the body

31. Cell Imaging Benefit
Ability to achieve high move & settle rate due to inherent motor braking capability
Higher resolution, faster moves for increased throughput and image accuracy.
Ability to track autofocus, on-the-fly.
Highest performance in smallest motor/stage package
Simple drive assembly (2 piece construction)
Cost effective technology compared to other devices

32. Auto Focus Axis Resolution from 10nm to 100nm
DuraMotor option for continuous step operation
Spring counter-balance for optics
Anti-migration crossed rollers for vertical operation
Available with a variety of motor sizes

33. neuroArm
neuroArm robotic system is a 2 robotic arms, each with 6 degrees of freedom for extra & intra-cranial functions (ultimately for spinal surgery)

34. Biomedical Device Applications
MRI Process (with non-magnetic motors
Robotic arm for micro surgery of the brain
MRI breast biopsy
Other diagnostic tools

35. MRI Probes (Brain & Prostate)

36. MR Tumor Ablation A B C Prostate Boundary Spatial Heating Pattern
Target
Boundary
Direction of rotation
Heating Applicator A B C

37. Biomedical / Bioprocessing Automation
Automation for Drug Discovery/Development
Motion modules for precise dispensing of syringes, capable of reaching 9mm pitch
Laboratory Robots for DNA Analysis
Chromatography

38. Biomedical /Pharmaceutical
Flow Cytometry
Cell Analysis
Medical Robot (end of arm tooling / grippers)
Micro-Fluidics
Dispensing
Pumps

39. Precise Dosage from the smallest available non-magnetic servo motors
Miniature Motors for Drug Delivery Pumps
Precise Dosage
from the smallest available
non-magnetic servo motors

40. Non-Consumer Vision Applications
Industrial Vision Applications for:
Security identification
Medical imaging
Part inspection

41. Gastro- Pill & Endoscope Auto Focus
Nanomotion’s expertise in combining miniature motors with small optics and electronics lends itself exceptionally well to medical devices used on the surface or internal to the body.
Miniature motor embedded in an optics module provides focus capability for gastrointestinal camera
Miniature motor/optics module for focus of endscopy

42. Military/Security Application Base
Aperture/Shutter Control
Auto Focus
Pan & Tilt

43. Aperture & Shutter Control
Light weight
Fast response
Low power consumption
Built in holding/braking without power

44. Auto Focus Focus & Zoom capability Ability for rapid moves
Zoom Module
Focus & Zoom capability
Ability for rapid moves
Capability to hold position with high shock load
Small package for auto focus
Linear guide
Moving lens B
Fixed lens
Moving lens A

45. Pan & Tilt Assemblies Satellite tracking XRay beam focus
Platform used for:
Satellite tracking
XRay beam focus
Optics positioning

46. Competitive Large Volume Application
Small motors deliver performance in a restricted package. It pans a full 360º (non-continuous) and tilts 90º, giving you more coverage than multiple fixed cameras.
No Noise
Position Stability
Long Distance focal capability

47. Semicon Application Base
Ebeam /Ion Beam wafer processing
Mask correction machines
Surface analysis equipment
Wafer inspection, processing, and packaging
Hard disk drive certification
Other storage media

48. (13) ST Motors on Nanotechnology tool
                                                  

49. (24) ST Motors+ Closed loop XYZ assembly

50. Semiconductor / Electronics
E-Beam writing & inspection
Wafer Metrology
Thin Film Measurement
Head Testing
Storage Media testing/ writing

51. Disk Media Testing Hard Disk Certification 2000 Tracks per hour
Moves 1 to 15 um in 5msec & settle to 100nm.
Inspection rates increase to 3000 and 4000 tracks per hour next year

52. Scan and Step

53. 7 Axis SEM Motion Platform
X Axis
Tilt Axis
Y Axis
Rotary Axis (& 3 point leveling)
Uses round bodied motor
Bottom axis moves 65kg
All motors vacuum/non-magnetic

54. Aerospace Application Base
Space Vehicles
Spectrometers
Sensors
                         

55. Custom Motion Platform
Vacuum and UHV motion systems
Providing high resolution positioning and stability
Complete multi-axis system with drive and control

56. Metrology
3-Axis system for Optical Surface Scanning,

57. Assembly / Automation Long Travel Actuation (Travel to 4 meters)
Inspection Device
Pick & Place assemblies

58. Summary
Ceramic Servo Motors deliver the most force per motor volume over conventional motor technology, making it well suited to a diverse application base of motion requirements.
Ceramic Servo Motors are robust, with the ability to work in wide range of challenging environments.
Nanomotion’s motors & amps can be used with any servo control, providing flexibility in applications.