1. Micro-mirror Supervisor: Prof. Kämper Team members: Chun Wa George Young Issis Contreras Castillo Ramanathan Swaminathan Spandan Shroff 10-10-2011 Micromechatronics System FH AACHEN University of Applied Science

2. S OME APPLICATIONS Barcode reader Consists of a light source instead of sound, a lens and a light sensor translating optical impulses into electrical ones. Technology Laser scanners CCD readers (charge-coupled device ) Camera-based readers Omni-directional barcode scanners Cell phone cameras

3. OCT - Optical Coherence Tomography Is an optical signal acquisition and processing method. Micrometer-resolution 1 – 15 μm 3D high-resolution images: retina, coronary arteries… Industrial applications: Non Destructive Testing(NDT)

4. ActuationAdvantagesDisadvantages Piezoelectric- Higher switching speed - Low power consumption - Short actuation range Electrostatic- Low power consumption - Fast switching - Ease of integration and testing with electrical control circuitry - Nonlinear characteristics - Limited by the pull-in effect - High actuation voltage - Fabrication complexity Thermal- Ease of fabrication (require only one composite beam) for bulk production - Nonlinear characteristics - Limited by the pull-in effect - High actuation voltage - Fabrication complexity

5. M ATERIALS Silicon Suitable for electronic, mechanical, thermal, and optical integration Can sustain harsh (mechanical) handling conditions Crystalline: mechanical properties are uniform across wafer lots Structure: Crystalline, Polycrystalline-polysilicon, amorphous Conductivity: Semiconductor Metals Aluminum Gold, Titanium, Tungsten Platinum and Palladium

6. Polymers Ceramics

7. static type Cantilever resonant type

8. VIDEO