1. 1 Page 1 Bill Tschudi wftschudi@lbl.gov Sponsored by: Public Interest Energy Research (PIER) California Energy Commission and administered by California Institute for Energy Efficiency (CIEE) Lawrence Berkeley National Laboratory ALLIANCE MICROELECTRONICS WORKSHOP LBNL RESEARCH UPDATE 9-16-04

2. 2 2 Overview Cleanrooms Healthcare Data Centers Laboratories Energy Intensive High-tech Buildings

3. 3 Cleanroom Activities –Benchmarking and Best Practices –Demand Controlled Filtration –Fan-Filter Test Procedure –Mini-Environments 3 Overview Update of Current Activities

4. 4 Laboratory Activities –Benchmarking and Best Practices –Berkeley Fume Hood Development Overcoming Barriers (CAL/OSHA) Side-by-Side Testing 3 Industrial Demonstrations – Labs 21 4 Overview Current Activities, cont.

5. 5 Data Center Activities – Benchmarking and Best Practices Load intensity Performance Benchmarks – Self-benchmarking Protocol – Investigate UPS Efficiency Improvement – Investigate Power Supply Improvement 5 Overview Current Activities, cont.

6. 6 Demonstration Projects LBNL role is to identify and scope possible demonstrations and arrange industry partners Technology Transfer Interaction with industry, e.g.: ASHRAE SEMATECH IEST Cleanrooms East/West Public utilities – emerging technology 6 Overview Current Activities, cont.

7. 7 7 Cleanroom Benchmarking Expanding the Database – 4-6 New Case Studies – Compare to Sematech Data – Adding Data on UPS and Standby Generation Benchmarking

8. 8 8 Recirculation Air Systems Average 3440 Average 1953 LBNL Data Sematech Data Benchmarking

9. 9 9 Baselines Based Upon Benchmark Data System Performance Target Benchmarking

10. 10 Make-up Air Systems Average 972 Average 946 LBNL Data Sematech Data Benchmarking

11. 11 Cleanroom Benchmarking Benchmarking Air Change Rates

12. 12 Standby Generation Loss –Several Sources Heaters Battery chargers Transfer switches Fuel management systems –Heaters alone (many operation hours) use more electricity than produced by the generator (few operating hours) –May be possible to eliminate heaters, batteries, and chargers Benchmarking

13. 13 Recent case study demonstrated recirculation setback 13 Case Study Benchmarking

14. 14 Recirculation Setback Benchmarking Based Solely on Time clock, 8:00 PM -6:00 AM setback No reported process problems or pushback 60% – 70% Power Reduction on turndown

15. 15 Recirculation Setback - Savings Benchmarking Annual Fan Savings from Daily and Weekend Setback: 1,000,000 kWh $130,000 - $150,000 Cooling load reduction when setback: 120 kW 35 tons

16. 16 Additional Savings Opportunities Benchmarking Currently using air cooled chiller at 1 kW/ton, partially to conserve water. The RO system rejects 2,500 – 4,000 gallons per day to sewer; RO reject water can be used for tower makeup. Space humidity control exceeded design and process requirements in most spaces; energy intensive dehumidification/reheat could be reduced by resetting humidity setpoints to design. Actively control recirculation setback for further fan savings. Reduce air change rates further.

17. 17 Controlling Air Flow to Maintain Cleanliness Save energy by reducing fan speeds without degrading conditions in cleanroom Reduction of recirculation fan speed during unoccupied periods or periods of no activity (potential for minienvironments also) Demand filtration based on real-time particle concentration measurements Fan power proportional to the cube of the flow rate, so small changes can result in large savings Demand Controlled Filtration

18. 18 Demand Controlled Filtration Pilot study completed - showing promise Collaboration with Cornell University Informal survey of ASHRAE TC 9.11 members regarding control of recirculation fan speed – Many members said that they use some form of demand controlled filtration now – Some have set backs during unoccupied periods – Manual override is provided Demonstration partner identified – Tool Manufacturer

19. 19 Pilot Study ISO Class 5 cleanroom at LBNL – monitored particle concentrations Three particle sensors – controlling to various size particles Varied flow rate by controlling recirculation fan speed Room Pressurization not studied Demand Controlled Filtration

20. 20 FFU Test Procedure Fan-Filter Unit Testing

21. 21 FFU Goals Develop a standard way to test and report performance of Fan-Filter Units (FFUs) Promote FFU energy efficiency through use of the standard FFU Test Procedure

22. 22 Test Procedure Development FFU Test Procedure A team of experts provided peer-reviews of the draft standard procedure prepared by LBNL – Project Advisors – ITRI/AMCA – FFU Manufacturers – End-users – Sematech

23. 23 On-going Development FFU Test Procedure LBNL continues to work with IEST to provide assistance to its more comprehensive recommended Practice (RP) which will include testing for other characteristics such as vibration and noise. Any input to the draft standard will be appreciated.

24. 24 Planned FFU Activities FFU Test Procedure Test Procedure will be “tested” at PG&E’s lab facility for small number of units Additional units to be tested depending upon funding available ITRI (Taiwan) test data may be useful PG&E intends to establish baselines based upon tests and use the baselines in incentive programs. Other California public utilities can also use the baselines that PG&E develops.

25. 25 Minienvironment Tasks Understand the energy implications of using minienvironments – micro and macro level Case study on minienvironment performance – Asyst Technologies Work with IEST on Recommended Practice for minienvironments Identify and promote energy efficiency opportunities Minienvironments

26. 26 Planned Minienvironment Activities minienvironments Develop strategies to improve efficiency based upon case study findings and other best practices input. Consider input from: –NEEA workshop attendees –IEST –Sematech –Suppliers/Users/Utility –A2C2/Cleanroom Magazines Host a workshop on minienvironment efficiency

27. 27 27 Data Center Benchmarking Data Centers Both LBNL and Uptime Institute found average IT equipment loading at ~25 W/ft 2

28. 28 Data Center Benchmarking Data Centers

29. 29 Power Supplies in IT Equipment Power Supplies

30. 30 Power Supplies in IT Equipment Power Supplies

31. 31 –Developed loading guidelines and test protocol for testing AC/DC power supplies for 1U, 2U and pedestal servers. –Calculation tool for evaluating impact of improving power conversion process efficiency at rack level. –Coordination with Server System Infrastructure (SSI) members to adopt loading guidelines and recommend higher efficiency levels for server power supplies. –Evaluate “real life” server PS loading level and processor usage activity for servers. 31 Power Supply Efficiency Power Supplies

32. 32 Power Supply Efficiency Power Supplies Very Low Processor Activity… …does not relate to very low power consumption Most of the time the GHz processor is doing activities that can be done by a MHz processor but the input power consumption is not changing much

33. 33 UPS System Benchmarking UPS Systems

34. 34 UPS Measured Performance 34 Sample of 12 field measurements. UPS Systems

35. 35 UPS Systems Measuring UPS efficiency to show impact of “high efficiency” option. Measured Result Manufacturer Spec On average, existing high efficiency modes can make a 4 to 5 % difference in UPS efficiency.

36. 36 UPS Systems In “high efficiency” mode, there can be one cycle (16.6 msec for 60 Hz) of voltage deviation on the output of the UPS. Power supplies downstream of the UPS can ride through this. Analyzing UPS performance in “high efficiency” option.

37. 37 Efficiency and Reliability –Data collection protocol. –Technical review of efficiency versus load (based on specification) for current generation static and inertial UPS. –Simplified calculation tools for comparing AC powering versus DC powering and evaluation of cost savings for higher efficiency UPS. –Testing of UPS to show impact of “high efficiency” option on static UPS –Coordinating with International labeling effort for quality & efficiency. 37 Labeling UPS Systems Possible UPS Efficiency Labeling Criteria

38. 38 Scoping demonstrations of technologies or strategies to improve energy efficiency in high- tech buildings Showcase New/Emerging or Under-utilized Technologies or Approaches 38 LBNL’s role Demonstrations

39. 39 Possible Demonstrations Demonstrations Follow-on from current research tasks: – Demand controlled filtration – Minienvironment efficiency improvement – Fan-filter test procedure Fume hood demonstrations currently are proceeding

40. 40 Demonstrations Additional potential demonstrations for Cleanroom/Lab/Data Centers: – Airflow visualization via helium bubbles – Combined Heat and Power – UPS efficiency improvement Energy efficient vacuum pumps

41. 41 LBNL portal Technology Transfer Website: http://hightech.lbl.gov

42. 42 Page 42 Thank you Questions? 9-16-04