1. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Co-ordinator: R.W. McCullough, Queen’s University Belfast, N Ireland, UK, Deputy-coordinator : R. Trassl, Justus Liebig University, Giessen, Germany Participating countries : Austria, France, Germany, United Kingdom

2. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Tasks Ion extraction and beam formation: A.Optimised extraction from ECR sources for low ion beam energies B.Highly charged ion beams from room-temperature EBIT sources

3. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Advanced ion transport and control systems C. Beams of highly charged ions at eV-energies D. Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution E. A novel technique for ultra high resolution, low energy HCI beam structuring F.Ion beam guiding in nano-capillaries

4. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task A Optimised extraction from ECR sources for low ion beam energies Originality of Activity Combination of computer simulation techniques and experimental emittance measurements "perfect" geometry and so optimise the extraction for low energy ion beam production with extraction fields of electrostatic and/or magnetic field configurations

5. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies JLU Giessen, Germany + CEA, Caen, France + QUB Belfast, UK WORK PACKAGE Specification/simulation/design/construction/emmitance measurements of extraction geometries to be tested Extracted beam energy distribution measurements Documentation and dissemination of results Implementation of optimum geometries throughout I3 ECR sources

6. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task B Highly charged ion beams from room-temperature EBIT sources Originality of Activity lon beams with excellent emittance (  1  mm  mrad / 10 keV/q) nano-positioning of single HCIs innovative cooling techniques to achieve energy spreads in the meV * q range

7. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies FZR, Rossendorf, Germany + QUB, Belfast, UK WORK PACKAGE Design/implementation of beam retardation system coupled to EBIT and ECR Implementation/characterization of 14.5GHZ 2kW ECRIS X-ray spectroscopy, q/A analysis diagnostics of a room-temperature EBIT Implementation/test of computer-added beam control Test of ECR operation in DC and afterglow mode Test of EBIT operation in pulsed and leaky mode Surface modification experiments Design/test of an EBIT with ion production on zero potential

8. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task C Beams of highly charged ions at eV-energies Originality of Activity High intensity, low emittance, low energy spread, low energy (eVs) HCI beams Combination of electrostatic and magnetic elements combined with nano-optical system of IMS and nanocapillary guiding/focusing techniques of HMI.

9. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies CEA Caen + QUB Belfast WORK PACKAGE Installation /diagnostic and optimisation of prototype beam line Improvement of vacuum conditions and magnetic sheilding Development of beam purifying system Experimental study of beam energy distribution Integration of a beam-pulsing system for specific time-shaping Replacement of the ECR-ion source Delivery of intense eV, highly charged high quality ions beams

10. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task D Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution Originality of Activity the trapping and cooling of the ions before extraction novel single-ion positioning and control optics

11. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies MPIK Heidelberg, Germany, + University of Duisberg-Essen, Germany WORK PACKAGE Ion beam optics simulations Ion optics design specifications, purchasing Mechanical engineering: drawings and construction Prototype ion focusing system: machining Ion cooling test for extraction Vacuum, ion optics assembly vibration insulation tests Delivery/ installation of AFM Coupling to EBIT beam line, beam tuning Sample preparation and irradiation studies with semiconductors Scanning of complex patterns: electronic tests; data acquisition

12. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task E A novel technique for ultra high resolution, low energy HCI beam structuring Originality of Activity Concept for a reduction ion-optical system for very low HCI energies ultra high resolution (<10 nm, depending on the quality of the illumination system) with very low energy HCI’s The desired low beam energy at the wafer level  20 eV per charge is achieved by an innovative imaging strategy

13. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies IMS, Vienna, Austria + New LEIF partners WORK PACKAGE Definition of User Requirement Specs Design of HCI-optics HCI-optics fabrication Demo experiments (IMS + New LEIF partners) JRA joint experiments: HCI nanostructuring Industry feasibility study Prototype tool design and fabrication­ (if consortium can be formed)

14. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Task F Ion beam guiding in nano-capillaries Originality of Activity potentially important applications in both macroscopic and mesoscopic focusing may provide superior focusing than conventional methods

15. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies HMI, Berlin, Germany + QUB, Belfast, UK WORK PACKAGE Macroscopic focusing by ion guiding Mesoscopic Focusing by ion guiding Research on the technique to guide ions in capillaries Application of AFM/STM

16. 29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies. Ion focusing by capillary guiding (a)fast ion tracks produced bent foil (b)after etching of the capillaries and stretching of the foil slow ions are focused on a spot using guiding effects (c)fast ion tracks are produced in a plane foil (d) the foil is bent leading to focusing by guiding effects