1. 1 Name ： Chien-Liang Mu ( 穆建良 ) Advisor ： Cheng-Hsin Chuang ( 莊承鑫 ) Department of Mechanical Engineering & Institute of Nanotechnology Southern Taiwan University of Science and Technology Southern Taiwan University of Science and Technology, Tainan Taiwan Date ： 2014-03-19 可感知力量與雙軸滑動運用具結構 化電極之軟性複合式觸覺感測器

2. 2 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

3. 3 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

4. Motivation The photographer for the manipulations of robotic Mechanical property Surface roughness Contact position Object slippage Contact force The controlling conditions of precision grasping: The mechanical arm for the auxiliary medical application Industrial automation Militarization Entertainment services 4

5. 5 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

6. Mechanism of Slippage Sensing Compressive Stress Tensile Stress Inner Structure Shear Force Normal Force 6 Advantages: Polymer-based, PVDF Simple Structure Passive Device Potential for Large Area Disadvantages: Only for Dynamic Force Relative low Sensitivity Cross-talk Effect Lateral Force: Friction Static Force: Object Weight Shear Force

7. Electrode PVDF Structure Strain Gauge Mechanism of Contact Force Sensing 7 Advantages: High sensitivity Simple Structure Small size and lightweight Cheap Disadvantages: Temperature Effect Adhesive quality impact Single direction measurement

8. 8 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

9. Numerical Simulation (Uniaxial) Materials Length (mm) Width (mm) Thickness (mm) Inner Structure223 Package Layer (Top)15 4 Package Layer (Bottom)15 1 PVDF Film4428×10 -3 PI Film9950×10 -3 Strain Gauge44100×10 -3 The specifications of tactile sensor The tactile sensor model design of FEM PropertyUnitsPVDFPI FilmInner StructurePackageStrain Gauge Densitykg/m³17801353157010831353 Young’ s modulusMPa300025105.4512510 Poisson’s ratio-0.350.340.48 0.34 Dielectric constant Farad/m 11 ˣ 10 -10 d 211,d 233 m/Volt 23 ˣ 10 -12 d 222 m/Volt -33 ˣ 10 -12 Material Properties for Numerical Simulation Uniform Load of 1N Package Layer (Top) Inner Structure Package Layer (Bottom) PI Film Strain Gauge PVDF Film  The sensor size about 15 × 15 × 5 mm 3 Shear Force of 1N 9

10. Numerical Simulation Numerical Simulation -Concept Validation The contour of stress on the strain gauge surface Extracted Path X(1) Y(2 ) Z(3) The profile of electric potential along an extracted path 10

11. Shear Force PVDF Film Numerical Simulation Numerical Simulation -Concept Validation X(1) Y(2 ) Z(3) The contour of electric potential on the PVDF surface Inner Structural Extracted Path Compressive Stress Positive Electrical Potential Tensile Stress Negative Electrical Potential 11

12. Materials diameter (mm) Thickness (mm) Inner Structure (PDMS 160)23 Package Layer (Top)154 Package Layer (Bottom)151 Adhesives (OCA Film)1525×10 -3 PVDF Film228×10 -3 FPC Film (Top)1538×10 -3 FPC Film (Bottom)1538×10 -3 PI Film PVDF Film Adhesives Package Layer (Top) Package Layer (Bottom) Inner Structure Numerical Simulation (Biaxial) CD 接地接地 ABCD A B Shear Load of 1N Mesh: 183,441 Elements 0˚ 滑動方向 45˚ 90˚ 180˚

13. Numerical Simulation(0 。 ) Stress Voltage Shear force 1N PVDF Film Tensile Stress Negative Electrical Potential Compressive Stress Positive Electrical Potential

14. Stress Voltage Shear force 1N PVDF Film Tensile Stress Negative Electrical Potential Compressive Stress Positive Electrical Potential Numerical Simulation(45 。 )

15. Stress Voltage Shear force 1N PVDF Film Tensile Stress Negative Electrical Potential Compressive Stress Positive Electrical Potential Numerical Simulation(90 。 )

16. Stress Voltage Shear force 1N PVDF Film Tensile Stress Negative Electrical Potential Compressive Stress Positive Electrical Potential Numerical Simulation(180 。 )

17. 17 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

18. Sensor Fabrication (ii)Coat PR →Exposure →Develop (iii)Wet etching electrode (iv)Strip PR (i)FPC thin film (v)PVDF thin film (vi)Strip Ag layer on PVDF thin film surface (vii)Bonding by adhesive (viii)PMMA master by machining (ix)Inner structure molding by silicone rubber (x)Bonding silicone rubber structure upon electrodes (xi)Package with PDMS (vii)Bonding Strain gauge by M-BOND 200 adhesive Silicone rubber Mask Ag PRCuPI PDMSPMMAPVDF Adhesion layer Strain Gauge FPC Film Microelectrode PVDF Film OCA Strain Gauge Inner Structure PDMS Photograph of flexible tactile sensor with structural electrode 18 Bottom ElectrodeTop Electrode Sample Bottom ElectrodeTop Electrode

19. 19 Motivation The Concept of Multifunction Tactile Sensor Numerical Simulation Sensor Fabrication Experiment Setup and Measurement System Results and Discussion Conclusions Outline

20. 20 Conclusions 電極圖案、結構大小更改，是否有效改善滑動訊號 於量測上準確度。 裝置於機器手臂上，觀察夾取力量與初始滑動產生

21. Thank you for your attention 21