1. Comparison of water supply systems Water supply system for MRC-1000
DI Water System
MPa
Dicing Machine (Dual dicer)
MPa, L/hour
Booster pump
In: 0.3,Out: MPa
MRC-1000, 0.3MPa, 1000L/hour

2. Comparison of water supply systems Water supply system for MRC-3000
DI Water System
MPa
Dicing Machine (Dual dicer)
MPa, L/hour
Booster pump
In: 0.3,Out: MPa
MRC-3000, 0.3MPa, 3000L/hour

3. Comparison of water supply systems Water supply system for NDB-2
DI Water System
MPa
Dicing Machine (Dual dicer)
MPa, L/hour
NDB-2,Max MPa, 1700L/hour
Booster pump
In: 0.3,Out: MPa

4. Comparison of water supply systems Water supply system for NDB-3
DI Water System
MPa
Dicing Machine (Dual dicer)
MPa, L/hour
NDB-3,Max MPa, 2000L/hour
Booster pump
In: 0.3,Out: MPa

5. Structure of MRC-1000 CO2 Gas, 0.15MPa Regulator Hydrophobic membrane
Max. pressure: 0.3MPa
CO2 CI
Water
PFA 12mm
Bypass line
CO2 water
Outlet
Control valve
(Manual valve)
DI water
Inlet
Main Line
PFA 12mm