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Chemical Vapor Deposition A Simple method of bottom up Fabrication.

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Presentation on theme: "Chemical Vapor Deposition A Simple method of bottom up Fabrication."— Presentation transcript:

1 Chemical Vapor Deposition A Simple method of bottom up Fabrication

2 Top Down Fabrication Top down fabrication is the process of reducing size of the material How to reduce nano –size? Electron lithography e Only required material is protected by a mask and the exposed material is etched away

3 Nano-Electronics “Nano” is from Greek word nanus meaning dwarf Semiconductor or micro-electronic devices that have been shrunk to the nanoscale.[ billionth (10 -9 ) of a meter]. Size  10 -100nm Supports information technology, defense, biosciences, and energy From Gorden Moore Law: exponential increase of transistor count on integrated circuit (IC) chips and an exponential decrease of their sizes with time These are switch

4 Semiconductor Electron and Holes in semiconductor Insulator Semiconductor

5 CVD Gas inlet Gas outlet Source Material Substrate Factors : 1.Temperature control 2.Gas type 3.Flow rate 4.Substrate distance 5.Type of substrate 6.Catalyst Applications: integrated circuits, optoelectronic devices and sensors, Nanowires Nanoparticles fine metal and ceramic powders protective coatings

6 Thermodynamics Chemical Reactions The Gibbs free-energy function G: G = H – TS, and  G =  H - T  S IInd Law of Thermodynamics: spontaneous reactions occur at P, T = const, if  G < 0

7 Electrospinning Electrospinning is a technique of producing polymer micro- and nanofiber non-woven mats of varying thicknesses. High Voltage Solutions Micro Pore Fiber Collectin poly(vinyl alcohol), Polyvinylpyrrolidone, Polyvinyl Acetate Organic materials easily soluble is water Solution of A + Solution of B + PVA (or PVP) Physics : Action of Point

8 Heat Treatment First stabilize the fibre Remove the fibre Select right temperature for the chemical reaction Results depends on: 1.Electrospining Condition a) Humidity b) Room temperature c) Solubility d) Electric Field 2.Heating 3.Type of gas used and Flow rate Use: Nanoelectronics, Medical ( Contact lens), Glamour's cloths, Manquinn Thermal insulatin fibre.


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