1. Micormachine: #2 (Oct. 9) １． Various applications of micromachines - Information input - Information output - Telecommunications - Medicine - Biotechnology - Precise measurement - Power generation - Others 2. Health information system using wearable sensors

2. Invention of Integrated Circuits by Jack Kilby http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

3. The First IC In 1958, at Dallas R&D Center if Texas Instruments 7/16 x 1/7 (inch)2 On a germanium substrate http://www.ti.com/corp/docs/kilbyctr/jackstclair.shtml

4. Micromotor

5. Microphone

6. Fingerprint Sensor Shigematsu et al, NTT Labs.

7. Fingerprint Sensor

8. Thermal Machining Schematic StructureSEM

9. Miniature Display Using Micromirrors Fast mirror -- 550  m minor axis Driven at resonance (6.2 kHz) Slow mirror -- driven at video refresh rate of 20 Hz R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

10. Micro Display for Virtual Reality R.A. Conant, et al., "A Full-Motion Video Display Using Micromachined Scanning Micromirrors," proc. Transducers '99, Sendai, Japan, June 1999, pp. 376-379.

11. Telecommunication ： Optical Switch

12. Structure of Optical Switch M. Makihara, et al., J. Lightwave Tech. Vol. 17. No. 1, pp. 14-18, 1999.

13. Medicine ： Micro Syringe OKa, et al., Kagawa University Silicon wafer Optical fiber Needle made of SiO 2 800  m

14. Micro Gas Flow Sensor Response time ： 2 ms Resolution ： 1 mm/sec Small size ： 1.7 mm 2 Sensing range ： 0 ～ 10 ， 0 ～ 30 m/sec Low power consumption ： Battery operated

15. Micrograph of Micro Gas Flow Sensor Sensor Heater Sensor

16. SEM of Micro Gas Flow Sensor

17. Micro Gas Sensor H. Baltes, et al., IEEE Spectrum, September, pp. 35-38, 1998.

18. DMD Pixel Structure

19. Projection Display Using DMD

20. Surface-Conduction Emitter Display

21. Watch: Typical Wearable Instrument - Usually people are not aware of wearing - Attached on human skin - Works continuously - Linked to time information - Other wearable things: ring, glasses

22. →Air pressure, altitude, water depth Pressure Sensor Silicon Vacuum

23. Wearable Pulse Oximeter Non-invasive and real-time measurement of oxygen concentration in blood

24. C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787. Liquid Injection Device

25. C. H. Mastrangelo, M. A. Burns and D. T. Burke, IEEE Proceedings, Vol. 86, No. 8, pp. 1769-1787. Microfluid Device Using Si and Plastic

26. Source: Ministry of Public Management, Home Affairs, Posts and Telecommunications Agriculture Environment Medicine, Health Security Disaster Prevention Others Images of Sensor Network Applications

27. Sensing Analog and digital signal processing RF transceiver Sensing Analog/digital signal processing RF transceiver Sensing Analog/digital signal processing RF transceiver Sensing Analog/digital signal processing RF transceiver Sensing Analog/digital signal processing RF transceiver Sensing Analog/digital signal processing RF transceiver Network module (Sensor module) Internet Wireless link PC N-interfacer (Sensor module) Ubiquitous Sensor Network Concept

28. SRAM Power regulator RF transceiver chipset Oscillator RF controller ADC Base board RS232C Power regulator USB Ether PC Sensor MPU Battery Base board RF board Battery Optional 303.825 MHz (a) (b) Block Diagrams

29. Sensor module (Ni3) Network module Sensor Network Using Ni3

30. 腕時計のケースに入れた Ni3

31. Eyeball movement sensor Rheometer Cardiograph Acceleration sensor Vibration Pulseoxymeter Vital data, Warning Skin thermometry sensor Skin conductivity sensor Body-movement- accelerometer Micro vibration accelerometer Wearable PC (with a built-in PHS ） Electroencephalograph Send information by radio （ admission, secure communication ） Feet pressure sensor Server for wearable PC Internet Information browser for cliants Health care system Medical institutions Fire stations Vital data management system Muscle- sound sensor ・ Dispersion to different kinds of instruments ・ Security ・ General purpose search engine ・ accumulation and management of vital data ・ correlation analysis of actions, living bodies, and environmental information ・ management of attributed data about actions and health Healthcare System Using Wearable Sensors

32. Current Status of Wearable Sensors