1. Sl.NoItemOwnerStatus 1a. To get the cost estimate of having a centralized compressor for all the labs at CeNSE. b. Estimate the cost of running a new pipeline from the existing compressor to other labs Arun- pending from last meetingQuote send for approval. 2Environmental Certificate for the the DG’s Arun - pending from last meetingQuote send for approval. 3To check the vibration inside cleanroom a. To get contact of Icon Analytics from Dr.Girish and get the quote for EMI measurement b. To get a handheld vibration meter from market and perform the check ourselves Mr.Adinarayana Murthy/Arun -Ongoing 2 quotes received for Vibration meter 4Furnace oxide growth: a. To place a point-of-use purifier for purifying the nitrogen gas before it enters the furnace b. Prof Vasu to have a look at the Tempress furnace and check the quality of the nitrogen by placing a moisture trap at the entry pint of the gas to the furnace. Dr.Savitha/Prof.Vasu3.9nm in the GAN reactor 5Silane leak to LTO tube: To check the voltage on the backside of the MFC pins. Dr.SavithaAll ok Action Items from September Cleanroom committee meeting

2. Sl.NoItemOwnerStatus 6LPCVD BUSCH pumps: Send the specifications of the pump to Prof. Anil kumar and Prof. Vasu Dr.SavithaDone 7To get a feedback from the Tecport and First Nano companies using Prof’s personal contacts Prof Shivshanker 8Cleanroom User’s meetingTechnology ManagersConducted on 30 th November 2012. Action Items continued..

3. Furnaces and Wet benches Savitha P

6. Weekly trend chart – Dry ox (5nm) Conditions: 1000 deg C – 1 min, 6 slpm oxygen flow, 20 min anneal oxide thickness (nm) No. of weeks

7. Wet benches Balmer-Lowrie picked up the shipment of chemicals from USA (shipping documents available – 5 consignments in total) New general wet bench has arrived Next phase chemicals – ordering in progress All wet benches working fine

8. Furnaces Processed 25 wafers simultaneously for the first time – expected thickness 700nm (Fourteen 110 wafers) Additional gas lines - expecting delivery sometime in Dec

9. Thank you