1. VICOROB Research group at the Universitat de Girona VICOROB VIsió per COmputador i ROBòtica (Computer Vision and Robotics Group) Institut d'Informàtica i Aplicacions Departament d'Electrònica, Informàtica i Automàtica Universitat de Girona FANIN Inspection System

2. VICOROB grup de recerca de la UdG 2 Microscope Adaptation System components: ● NIKON MM40 ● Linear Camera 4096 pixel res. ● Parker MX80L high precision motorized linear stages ● NIKON MM40 ● Linear Camera 4096 pixel res. ● Parker MX80L high precision motorized linear stages

3. VICOROB grup de recerca de la UdG 3 Prototype Development (i) Reference self-positioning The scanning system is able of self- positioning for a two- reference alignment. Test structures used as aligment reference Controller GUI

4. VICOROB grup de recerca de la UdG 4 Prototype Development (ii) Gross Reference Detection After self-positioning, the system is able to refine the search by linear image superposition to make a narrower window A zoom on the test structure A zoom on the test structure

5. VICOROB grup de recerca de la UdG 5 Prototype Development (iii) Fine Reference Detection The test structure is segmented and its centroid is computed at subpixel accuracy This procedure repeats for the opposite test structure and the crystal orientation is computed The crystal position and orientation are transformed to meet the crystal CAD design Test structure segmentation Test structure segmentation Subpixel accuracy Centroid computation Subpixel accuracy Centroid computation

6. VICOROB grup de recerca de la UdG 6 Prototype Development (iv) Open circuit detection ● Open circuit ● Short Circuit ● Ripped tracks ● Open circuit ● Short Circuit ● Ripped tracks Detection examples