1. Overview of LBNL’s High-Tech Buildings Project Activities Bill Tschudi and Tim Xu April 21, 2004 WFTschudi@lbl.gov TTXu@lbl.gov

2. Diverse Support  California Energy Commission  Labs 21  New York State Energy Research and Development Authority (NYSERDA)  Northwest Energy Efficiency Alliance (NEEA)  Public Utilities  California Institute for Energy Efficiency (CIEE)  Industrial Technology Research Institute (ITRI)  Montana State University

3. Industry Collaborations  ASHRAE (lab, cleanroom, data center TC’s)  IEST (minienvironment, fan-filter units)  Air Movement and Control Association (AMCA)  Silicon Valley Manufacturers Group  7X24 Exchange Organization  Uptime Institute  ITRI (Industrial Technology Research Institute, Taiwan)  Sematech

4. Research Collaborations  University of California UC Merced Campus  Cornell University Demand Controlled Filtration  Georgia Tech CEETHERM  State University of New York Data Center Air Management  Industrial Technology Research Institute Energy Benchmarking Fan-Filter Unit testing

5. Energy Intensive High-tech Buildings Cleanrooms Data Centers Laboratories

6. Energy Benchmarking  Enables comparison to other similar facilities  Establishes baseline to track performance over time  Prioritizes where to apply energy efficiency improvement resources  Identify better performing systems  Identify maintenance and operational problems  Leads to operational cost savings

7. Some Results: Energy End Use in Cleanrooms

8. Air Recirculation Comparison

9. Air-change Benchmarks

10. Make-up Air System Comparison

11. Chilled Water Systems

12. UPS Efficiency

13. Benchmarking vision  On-line benchmark results that anyone can access for comparison.  We’d like to incorporate benchmark data that others have.  Primarily interested in building systems efficiency metrics – may include production metrics if there is interest.  Data reporting will be anonymous.

14. Tools and Publications  Cleanroom Programming Guide  Laboratory Design Guide  Design Intent Tool  Labs 21 Benchmarking Tool  Energy Research Roadmaps Available now from LBNL website:

15. Case Studies/Charrettes/Project Review  Various Industries and Institutions  Cleanroom Case Studies  Laboratory Case Studies  Data Center Case Studies  Charrettes and project reviews: IBM Genentech Sandia NEEA (fab of the future)  HP  LBNL Molecular Foundry  UC Merced Campus

16. Laboratories for the 21 st Century  Annual Conference – October 5-7, St.Louis  Training Seminars – nationwide  Labs 21 Partners  Tool kit Lab Design Guide Design Intent Tool  Website: http://www.labs21century.gov/

17. Energy Benchmarking Tool National database of lab energy use data  Web-based input and analysis  Currently approximately 40 facilities  Building level data (e.g. Site BTU/sf)  System level data (e.g. W/cfm)

18. Energy Benchmarking Tool Data input requirements Location Type Area Hours of operation Energy use Peak loads System characteristics Efficiency features

19. Benchmarking Tool – Analysis

20. Current Project Activities Cleanrooms Laboratories Data Centers

21. Current Cleanroom Activities  Energy benchmarking and best practices identification  Demand controlled filtration  Fan-filter test procedure  Investigate efficiency opportunity in minienvironments

22. Demand Controlled Filtration  Pilot study in LBNL cleanroom - completed  Workshop being planned to review the concept with industry  Alternate methods of recirculation setback investigated  Demonstration in an operating industry cleanroom (possibly Lam Research)

23. Fan-Filter Unit Test Procedure  Draft test procedure for energy performance issued for comments. Once in place, FFU’s performance can be measured by the standard test and will have a basis for “apples to apples” comparisons and owner specification.  IEST is developing a more comprehensive procedure  CA utility is interested in using the procedure to establish baselines for incentives  FFU manufacturers encouraged to volunteer their units for testing

24. Pressure vs. Airflow Velocity

25. Total “Pressure Efficiency”

26. FFU Energy Performance Index W/cfm @ 0.5” Pressure

27. FFU Energy Performance Index W/cfm @ 70 fpm Face

28. Minienvironment Investigation  Examine efficiency opportunity in selected minienvironment(s)  Partner with Asyst  Collaborate with Sematech  Develop strategies to improve efficiency

29. Minienvironment Investigation  Identify opportunities to improve overall facility energy efficiency  A field-study site is being sought  A demonstration in operating facility will be proposed to the CA Energy Commission

30. Current Laboratory Activities  Energy Benchmarking and Best Practices Identification  Low Flow Fume Hood Development  Overcoming Barriers (CAL/OSHA)  Side-by-Side Testing  3 Industrial Demonstrations

31. Better Fume Hood Containment at 40% Less Exhaust flow

32. And better worker safety

33. Current Data Center Activities  Energy Benchmarking and Best Practices Identification  Self Benchmarking Protocol  Investigate Efficiency Opportunity in UPS Systems  Investigate Efficiency Opportunity in Power Supplies

34. Additional Activities  Planning and Scoping Demonstration Projects  Controlling air flow based upon particle counts (Lam Research)  Fan-filter testing  Efficiency improvement in mini-environment (Asyst, Jazzsemiconductor)  Flow visualization using helium bubbles  Others ?  Technology Transfer

35. Sematech input to LBNL project  Ram Mallela and Phil Naughton are on the project advisory committee for the CEC project  Others are welcome to participate  The committee can recommend changes in direction  Next CA project advisory meeting – May 13  Participation in Labs 21 is welcome also

36. Questions? Bill TschudiTim Xu wftschudi@lbl.govttxu@lbl.gov 510-495-2417510-486-7810 Website: http://ateam.lbl.gov