1. Test station for ALICE pixel chip Confidential Information COMMENT by Y. Kwon Strategy : make sure commitment can be achieved before main commitment to company (= offering conditional purchase). Chip test can be achieved with  50  laterally, 50  overdrive vertically. 1

2. Test station for ALICE pixel chip Confidential Information COMMENT by Y. Kwon Mechanically achievable accuracy better than  30 . Current vision & robot accuracy within  30 , z < 30  (at max). For target accuracy (  5 , z < 5  ), new vision and robot is needed (claim by EC3). Note) Numbers quoted here are not Gaussian or FWHM resolution, but any smearing fits within the ranges. 2

3. Test station for ALICE pixel chip Confidential Information COMMENT by Y. Kwon Do we really want to go to the final specification? Use current version? Cheaper & ready for chip test (~1-2 month). Conditional order? ~120 kCHF Note) Two WorldSkills medalists in EC3. WorldSkills is an international skills competition for youth ( 기능올림픽 / 國際技能 - 大會 ). 3

4. Test station for ALICE pixel chip EC3 R&D Division June.2015

5. Test station for ALICE pixel chip Confidential Information 5 https://drive.google.com/file/d/0B6EVlprPvkkUcjdnYUNrcm5zdkE/view?usp=sharing

6. Test station for ALICE pixel chip Confidential Information 1.Concept 2.Status 3.Plan Contents 6

7. Test station for ALICE pixel chip Confidential Information 7 Pick & place scheme X axis robot Y axis robot Z1 axis robot Z2 axis robot (Probe contact) Stone plate

8. Test station for ALICE pixel chip Confidential Information Z2 Top view 8 X Y θ Z1 V 350mm300mm Stroke 800 mm Stroke 450 mm 300mm 350 mm

9. Test station for ALICE pixel chip Confidential Information Z2 Side view 9 P&P head : θ + Vision 10kg less θ 700mm 50mm Stone plate 100~150mm Stroke 350 mm Stroke 100 mm V Test box

10. Test station for ALICE pixel chip Confidential Information Test box 10 30mm 100~150mm Test box Stone plate 310mm 350mm 340mm Level adjust bolt Fixed bolt 300mm 340mm Crystal chuck Vacuum line

11. Test station for ALICE pixel chip Confidential Information Detail 11 Vacuum chuck Vacuum pass line 15.2mm 30.2mm

12. Test station for ALICE pixel chip Confidential Information Chip tray 12 Tray for 20x10 chips 15.2mm 2mm 30.2mm 350mm 4mm 1.Tray material : Teflon coated metal 2.Hole depth : 150~200 ㎛ 3.20 by 10 array : Total 200 chips 4.1chip 3min : 1 tray 10 hours

13. Test station for ALICE pixel chip Confidential Information Probe card 13 114mm 141mm Needles <90mm 101mm Cable Connector

14. Test station for ALICE pixel chip Confidential Information Target spec 14 NoModel No.DescriptionAccuracyUnitRemark 1-Motion movement for repeatability±5µmX,Y,Z1,Z2 2 Rotation movement for repeatability ±0.01degΘ 3Transfer accuracy±10µmTarget goal 4Surface flatness±20µm- 5Vision camera accuracy±5µmTarget goal

15. Test station for ALICE pixel chip Confidential Information 1.Mechanical alignment ±30 ㎛ (X, Y). 2.Space between sensor and grip 30 ㎛ at pick up & place (Vacuum grip). 3.Improvement in mechanics and vision in progress (High performance robot and vision device will make it). 4.A detailed plan exists. Current status 15

16. Test station for ALICE pixel chip Confidential Information 16 Pick & place Y axis movement X axis movement Z axis movement

17. Test station for ALICE pixel chip Confidential Information 17 Robot mechanics No Model No. DescriptionAccuracyUnitRemark 1-Motion movement for repeatability±25µmX,Y,Z 2Rotation movement for repeatability±0.1degΘ 3Transfer accuracy±30µm With vision Measure accuracy 4Surface flatness±30µm Tray edge to chuck center 5Vision camera measure accuracy±5µm Continuous measure Crystal chuck Tray X axis gantry robot Y axis cartesian robot Z axis cartesian robot

18. Test station for ALICE pixel chip Confidential Information 18 Vision measurement Before measurementAfter measurement End compensation 1.After measurement X, Y distance - X axis : + direction, 1680 micron - Y axis : - direction, 2537 micron 2.End compensation X, Y distance - X axis : + direction, 1 micron - Y axis : no direction, 0 micron

19. Test station for ALICE pixel chip Confidential Information 19 P&P head implementation Theta angle adjust Tension adjust Vacuum grip

20. Test station for ALICE pixel chip Confidential Information 20 P&P vacuum grip Material : Teflon Vacuum hole

21. Test station for ALICE pixel chip Confidential Information 21 Crystal chuck Material : Quartz Vacuum line Air blow line 30.05 + (2 x 0.03) mm 15.05 + (2 x 0.03) mm Shallow hole (sensor slot)

22. Test station for ALICE pixel chip Confidential Information 22 Tray Material : Teflon-coated metal 30.05 + (2 x 0.03) mm 15.05 + (2 x 0.03) mm Shallow hole (sensor slot)

23. Test station for ALICE pixel chip Confidential Information Test result 1.Multiple transport into sensor slots in the tray and the chuck (  100 times) -> The whole system fits better than 30 ㎛. 2.However we believe the achieved level is the limit of the current vision and robot system. Proposed upgrade in the next page is desirable (Main spending is required).

24. Test station for ALICE pixel chip Confidential Information Desired upgrade 1.Vision system upgrade : 50k CHF Current equipment Fact’Target spec. CameraCCD 5M pixel FOV : 9 mm LensMagnification : 2X, Working distance : 110 mm LightWhite ring type light Working distance : 20 mm Measure accuracy ∂X, ∂Y : ±5 ㎛ Θ : ±0.01 degree Upgrade equipment Fact’Target spec. CameraCCD 2M pixel FOV : 37 mm LensMagnification : 1X, Working distance : 250 mm LightWhite bar type light Working distance : 10 mm Measure accuracy ∂X, ∂Y : ±30 ㎛ Θ : ±0.1 degree

25. Test station for ALICE pixel chip Confidential Information Desired upgrade 2.Robot system upgrade : 50k CHF Current equipmentUpgrade equipment Fact’Target spec. X axis Gantry type : stroke 1200 ㎜ Belt : max speed 1.5m/s Moving accuracy : ±20 ㎛ Y axis Cartesian type : stroke 300 ㎜ Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛ Z axis Cartesian type : stroke 100 ㎜ Ball screw : C7, max speed 0.5 m/s Moving accuracy : ±10 ㎛ Θ axisRotary type : stroke 270degree Belt : max speed 90degree/s Moving accuracy : ±0.1degree Fact’Target spec. X axis Gantry with LM type : stroke 800 ㎜ Ball screw : C5, max speed 0.5m/s Moving accuracy : ±5 ㎛ Y axis Cartesian type : stroke 450 ㎜ Ball screw : C5, max speed 0.5 m/s Moving accuracy : ±5 ㎛ Z1 axis Cartesian type : stroke 100 ㎜ Ball screw : C5, max speed 0.1 m/s Moving accuracy : ±5 ㎛ Θ axisRotary type : stroke 10degree Belt : max speed 10degree/s Moving accuracy : ±0.01degree