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Published byConstance Carson Modified over 9 years ago
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Furnaces and Wet bench area Savitha P
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Wet bench - Movement CMOS wet bench moving to the new clean room Purchase orders for chemicals still not released MOS chemicals will take 3-4 months to ship after release of the purchase order
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Furnaces - Movement All except annealing furnaces moving to Equip. dev. room Maintenance need to be done for all – Change thermocouple (Euros 625-650) – Gas connections to suit clean room – New tubes/ clean old tubes
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Dektak, 4-probe, Film thickness probe measurement and CPD Moving to new clean room – Document made regarding precautions while moving Stylus/ probe tip to be protected Probe head to be cushioned – CPD moving to Equp. dev. room
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