1. TNO Industrial Technology 4M Network of Excellence Subtask 11.1b Non-silicon, low-cost physical sensors

2. Feb 18, 2005, TU Wien4M Network of Excellence2 Demonstrator TNO: Low-cost pressure sensor Micromachined pressure sensors Commercially available Typically fabricated in silicon  high volume applications because of high cost of production facilities Low cost pressure sensor based on materials and processes commonly applied in microelectronics First prototypes have been built and are being tested in the actual application. Initially intended for a military application, but expected to be applicable in other fields as well.

3. Feb 18, 2005, TU Wien4M Network of Excellence3 Low cost pressure sensor prototype Mounted on LTCC substrate with standard metallisations (AgPd) Different sensor membrane materials: LTCC, copper, stainless steel Standard interconnection techniques (soldering) Built as an autonomous sensor with its own interface and power electronics. Protected from environment by Kovar housing.