1. SAO Development of adjustable grazing incidence x-ray optics Paul B. Reid 1, William Davis 1, Daniel A. Schwartz 1, Sang Park 1, Susan Trolier-McKinstry 2, Rudeger (Derek) H. T. Wilke 2, and Brian Ramsey 3 AXRO2009, Prague, Czech Republic 1 Smithsonian Astrophysical Observatory 2 Pennsylvania State University 3 NASA Marshall Space Flight Center Paul B. Reid 1, William Davis 1, Daniel A. Schwartz 1, Sang Park 1, Susan Trolier-McKinstry 2, Rudeger (Derek) H. T. Wilke 2, and Brian Ramsey 3 AXRO2009, Prague, Czech Republic 1 Smithsonian Astrophysical Observatory 2 Pennsylvania State University 3 NASA Marshall Space Flight Center

2. SAO pbr 12/2009 2 AXRO2009, Prague, December 2009 How many astronomers does it take to change a light bulb?

3. SAO pbr 12/2009 3 AXRO2009, Prague, December 2009 How many astronomers does it take to change a light bulb? Ten. One to change the bulb…

4. SAO pbr 12/2009 4 AXRO2009, Prague, December 2009 How many astronomers does it take to change a light bulb? Ten. One to change the bulb … and nine to argue about the color.

5. SAO pbr 12/2009 5 AXRO2009, Prague, December 2009 Why adjustable optics? Gen-X  Introduction –50 m 2 effective area at 1 keV –0.1 arcsec HPD at 1 keV –Subject of two NASA studies PI’d at SAO NASA Visions Mission Study (2004-2005) NASA Advanced Mission Concept Study (2008-2009) –Follows IXO and builds upon IXO technology –60 m focal length using an extensible boom –Mirror unfolds to ~ 16 m diameter –Launch on Ares V launch vehicle

6. SAO pbr 12/2009 6 AXRO2009, Prague, December 2009 Introduction: bi-morph mirrors  Develop bi-morph mirrors –Thin film (1 – 5 um) piezoelectric actuators deposited on back surface of thin (0.2 – 0.4 mm) thermally formed glass mirror –Strain direction of piezo is parallel to mirror surface –Energizing piezo produces bending in the surface (similar to bi-metallic bending) –Calibrate the piezo responses (impulse functions) for use in correcting mirror figure on-orbit, but use a feedback loop for correction

7. SAO pbr 12/2009 7 AXRO2009, Prague, December 2009 Adjustable Optics  Finite element modeling of impact of mirror mounting (support constraints, or boundary conditions) on influence functions –SAO  Development of thin piezo film deposition on thermally formed thin glass sheets and thin electroplated metal optics –PSU  Fabrication of thin Ni/Co electroplated mirrors –NASA MSFC

8. SAO pbr 12/2009 8 AXRO2009, Prague, December 2009 Finite Element Modeling – Mounting Constraints Kinematic mount5 point mount each end + 1 point each side

9. SAO pbr 12/2009 9 AXRO2009, Prague, December 2009 Finite Element Modeling – Mounting Constraints

10. SAO pbr 12/2009 10 AXRO2009, Prague, December 2009 Crystallization of PZT in Perovskite Phase Single layer films: spun on at 1500 rpm and pyrolized at 225 o C, 400 o C for 4 minutes Crystallization step performed in box furnace (1 hour hold at temp) Can crystallize in PbZr 0.30 Ti 0.70 O 3 in perovskite phase at 550 o C

11. SAO pbr 12/2009 11 AXRO2009, Prague, December 2009 Deposition of PbZr 0.52 Ti 0.48 O 3 on PbZr 0.30 Ti 0.70 O 3 PZT 30/70 seed layer used for all samples 3 and 6 layers of PZT 52/48 deposited on seed layer under different conditions No RTA = 1 hour crystallization in furnace @ 550 o C after 3 layers w/RTA = 3 minutes @ 550 o C in RTA after pyrolysis of each layer plus box furnace heat treatment after 3 layers

12. SAO pbr 12/2009 12 AXRO2009, Prague, December 2009 Deposition of PZT Films on 1x1 inch Substrates PZT film Spin-coat solution:1500 rpm for 40 sec Pyrolysis 1: 225 °C for 4 min Pyrolysis 2: 400 °C for 4 min Crystallization at 550 °C for 3 min in RTA Crystallization at 550 °C for 1 hour in Box Furnace PZT 30/70 seed layer is deposited with same flow but with crystallization done after single layer

13. SAO pbr 12/2009 13 AXRO2009, Prague, December 2009  Films crystallized using RTA/Box furnace approach (6, 9, 12 layers of 52/48 on 30/70 seed layer)  Crystallizes in perovskite structure – no evidence of pyrochlore Films Grown up to thickness of 1 µm

14. SAO pbr 12/2009 14 AXRO2009, Prague, December 2009 Development of Adjustable Optics – test optic

15. SAO pbr 12/2009 15 AXRO2009, Prague, December 2009 Development of Adjustable Optics – test optic

16. SAO pbr 12/2009 16 AXRO2009, Prague, December 2009 Films on 1x1 inch Substrate: Electrical Properties  Relative permitivity (average of two samples) is 785 @ 10 kHz for 1.06 µm thick film (Films on Si are ~1000 @ 10 kHz)  Hysteresis loops show low levels of imprint (loops shifted ~15 kV/cm)  P r ~ 30-34 µC/cm 2, E c ~55-70 kV/cm (Films on Si: 25 µC/cm 2, 45 kV/cm)

17. SAO pbr 12/2009 17 AXRO2009, Prague, December 2009  Pyrolysis and crystallization performed in box furnace  Film is 1.09 μm thick  No evidence of pyrochlore phase Film on 4 x 4 Inch Substrate: X-ray Analysis

18. SAO pbr 12/2009 18 AXRO2009, Prague, December 2009 Film on 4 x 4 Inch Substrate: Electrical Data  Measured on 1 x 1 mm electrodes – 1 x 1 cm electrodes all shorted  10 kHz: ε r ~ 770, tan δ~ 0.04

19. SAO pbr 12/2009 19 AXRO2009, Prague, December 2009 Piezoelectric Properties: e 31,f  e 31,f =D 3 /(x 1 +x 2 )  Measurement error ~ +/- 10%  Typical values for randomly oriented thin films are -6 to -7 C/m 2

20. SAO pbr 12/2009 20 AXRO2009, Prague, December 2009 Sputter Deposition of PZT at PSU  Three gun sputter system installed and operational –Developing sputtering parameters and appropriate stoichiometry  Initial test produced appropriate film prior to crystallization - awaiting results of this step.

21. SAO pbr 12/2009 21 AXRO2009, Prague, December 2009 Summary and Acknowledgements  Summary –Initial finite element modeling of adjustable optics mounting constraints demonstrates “less is less” – less constrained system has what appears to be less desirable influence functions in terms of lateral extent and dynamic range of adjustment –~ 1 um thick piezo films have been deposited on thermally formed glass Good piezoelectric properties Improved deposition approach defined (sol-gel spin coat  sputtering) –Finite element modeling demonstrates that 1 um thick PZT yields sufficiently large deformations at 100 ppm strain for 100 um thick Ni/Co mirrors and, at ~ 500 ppm strain, for 400 um thick glass mirrors.  Acknowledgements –This work supported by a NASA APRA and the Gordon and Betty Moore Foundation

22. SAO pbr 12/2009 22 AXRO2009, Prague, December 2009 Adjustable Grazing Incidence Optics  Looking to hire a Post-Doc –AAS job listing 26134