1. Overview of Semiconductor Technologies Key Semiconductor Technologies. - Bulk silicon, SOI, III-V and II-VI semiconductors. Economic Impacts of Semiconductor Industry. Comparison of SIA Technology Node. Photovoltaic Technology and Market Analysis. Photonic Devices: LEDs and LDs.

2. Comparison of SIA Technology Node Introduction Projections in 94 vs. 97 94’ Roadmap9801040710________ 97”Roadmap9799030609________ Min feature(  m)0.250.180.130.080.05 Lithography248nm248/193193EUVEUV? DRAM bits/chip 256M1G4G16G64G  P xstrs/chip28M64M150M350M800M  P xstrs/cm 2 7M13M25M50M90M New Materials for the New Millennium: Copper metallization replaces Al-Cu interconnects. New dielectric materials such as Ta 2 O 5, BaSrTiO 3 are being used to replace SiO 2, Si 3 N 4 to handle the increase of DRAM density. Thinner oxide requires higher dielectric materials. New SOI technology to replace bulk Si- technology for higher packing density, higher speed and lower power consumption.

3. Economic Impact of Semiconductor Industry (S.I.) Global S.I. growth rate at 15%/year reaching $140 B in 97, which reached to $300 B by early 2000 because of strong demand of communications equipment and computers. S.I. growth holds down inflation: S.I. price index: -4.5%/yr vs. +3%/yr for the rest of economy. S. I. offers higher wages and lower inflation. Faster technology diffusion (25%): Auto:60 yrs, Tel:35, TV:25, PC:13, Internet:< 10 yrs. Drivers of semiconductor market growth: declining prices and increasing performance: price/DRAM bit reduced by 25 to 30%/yr, while IC complexity double every 18 months (Moore’s Law). Less’s Law: improvements in reliability have accompanied increases in chip complexity:transistors/die increases from 2x10 3 in 71 to 10 8 in 98.

4. Current Status, Issues, and Trends in Semiconductor Technologies Bulk Silicon Technologies: - scaled down submicron VLSIs - larger wafer size, 8, 10, 12”.. - copper interconnects - high dielectric insulating materials - Si/Si x Ge 1- x technologies Silicon-On-Insulator (SOI) technologies: - SIMOX and wafer bonding (WB). - low power, low voltage, high-speed, and high density ULSIs. 3-D IC’s III-V and II-VI Compound Semiconductor Technologies. - LEDs, LDs, detectors, MESFETS, HBTs, HEMTs, quantum effect devices (QWIPs). - p hotovoltaic devices (solar cells) technology - wi de band gap and high temperature devices ( InGaN, GaN, AlGaN, SiC, diamond)

5. Comparison of the World Semiconductor Industry

6. Delay Time vs. Power Dissipation for CMOS and Other Devices

7. Exponential Increase of DRAM Density vs. Year (Based on SIA Road Map)

8. Microprocessor Computational Power vs. Year

9. Key Silicon-On-Insulator (SOI) Technologies Separation by Implantation of Oxygen (SIMOX) Process Wafer Bonding and SIMOX- WB Process Zone Melting Recrystallization (ZMR) Process Epitaxial Lateral Overgrowth (ELO) Process (3-D IC’s) Fully Isolation of Porous Silicon (FIPOS) Process

10. Band Gap Energy vs. Lattice Constant for Elemental and Compound Semiconductors

11. A Bright Future for Blue/Green LEDs (Highly luminous III-V nitride based LEDs) ColorWavelength (nm) Violet< 450 Blue 450 - 490 (InGaN/AlGaN LED) Green490 - 560 (InGaN/AlGaN or ZnSe LED) Yellow560 - 590 (AlInGaP LED) Orange590 - 630 Red > 630 (AlGaAs LEDs)

14. Photovoltaic (PV) Market Analysis PV Market Growth Rate: Solar cell module production average increase: 14% per year 90-97, and production jumped by 38% in 1997 to 122 MW p. Growth rate is expected to increase at a rate of 20%/year over the next 15 years with potential annual module shipments of around 2,25 GW p (about $3billions per year by 2010) in the year 2010. PV Markets: - consumer electronic products (14%): calculators, watches, lanterns... - off-grid residential power systems (35%): cottages, rural village, homes and offices. - off-grid industrial power system (33%) : telecom.repeaters. - off-grid connected PV systems (18%):government and/or utility demons.

15. Key PV Technologies Single crystal Si solar cells. Poly Si solar cells. a- Si thin film solar cells. Ribbon Si solar cells. CdTe thin film solar cells. CIGS (CuInGaSe) thin film solar cells. III-V semiconductor (GaAs, InP, GaInP..) solar cells - single and multi-junction solar cells Concentrator solar cells.