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Published byAlexis Washington Modified over 9 years ago
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Crystal Growth of III/V Semiconductor Nanowires Kobi Greenberg
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Metal organic molecular beam epitaxy (MOMBE)
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Future applications of nanowires Martensson et al Nanowire LED Maarten et al Single photon emitter Algra et al Crystal structure engineering Nanowires as a Biological Interface Mårtensson et al
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The vapor liquid solid growth mechanism TMI 420 o C In P2P2 Au catalyst InP
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TEM pictures of InP nanowires grown in our lab by the vapor liquid solid method ZB WZ Au InP
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Two ways to arrange cannon balls Cubic structure Hexagonal structure
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Stacking fault formation A B C A B C A B A B A B Zincblende nanowireWurzite nanowire With stacking fault A B C B A B SF
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Limitations of the vapor liquid solid method Difficult to eliminate stacking fault Very sensitive to wafer surface effects Calahorra, Greenberg et al. nanotechnology 2012 TMI 420 o C In P2P2 Au catalyst InP
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The selective area vapor liquid solid growth method Si 3 N 4 Dalacu et al, Nanotechnology 2009 Au catalyst TMI 420 o C P2P2
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TEM pictures of InP nanowires grown in our lab by selective area vapor liquid solid method: no stacking faults
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Advantages of the selective area vapor liquid solid method Easy to eliminate stacking fault in InP nanowires not sensitive to wafer surface effects Predictable growth rate Si 3 N 4 Au catalyst TMI 420 o C P2P2
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Fabrication Wafer cleaning Si 3 N 4 deposition Electron sensitive resist coating Electron beam lithography + development+ BOE InP B substrate
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Gold evaporation Lift off
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nanowire heterostuctures: important for device applications conventional layers of materials having different lattice constant cannot be grown on top of each other as single crystals. Due to their small dimensions, a stack of materials with different lattice constants can be grown as a single crystal GaP InGaP
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Heterostructure analysis by EDX and STEM HAADF 1 2 3 12 3 3
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Summary Selective area vapor liquid solid is the method of choice for defect free nanowire growth. Heterostructures of InP and GaP having 7.7% lattice mismatch were demonstrated. Method will be implemented for other materials such as GaAs, GaP,InAs and their heterostuctures.
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