2. Customer list includes more than 60% of the major semiconductor manufacturers worldwide.
Fabworx robots and component products have been successfully installed in PVD, CVD, Etch and RTP departments in 150mm, 200mm and 300mm fabs.

3. Fabhp-hdp for extended reach tools Fabhp-v Fabpro Fabhp-v 300
Fabworx Solutions offers robots for Endura®, Centura® and Producer® applications:
Fabhp
Fabhp-ht for high-temperature processes such as Rapid Thermal Processing (RTP) and Epitaxal Layer (EPI)
Fabhp-hdp for extended reach tools
Fabhp-v
Fabpro
Fabhp-v 300
Fabhp-v 300 RTP
Fabht 300
Endura, Centura and Producer are registered trademarks of Applied Materials, Inc.

4. Fabworx robots have been engineered to:
Reduce particles
Eliminate scratching
Increase repeatability
Enhance tool throughput
Generate greater return on investment

5. Fabworx Solutions offers a line of OEM-compatible component products designed to improve the performance of your existing robots.
150/200mm components include:
Pivot assembly for HP®, HP+, HDP, VHP® or VHP+ robots
HP®/HP+ hub assembly
VHP® hub bearings
Elbow assembly and elbow bearings for HP®, HP+, VHP® and VHP+ robots
End effectors
Thin Profile Moly Blades for Buffer Chamber
Gravity Edge Hold™ (GEH) End Effector for Transfer Chamber
300mm components include:
Wrist upgrades for VHP® or XP® robot
End effectors with o-rings or Gravity Edge Hold™ technology
HP, VHP and XP are registered trademarks of Applied Materials, Inc.

6. Tightness of x-style bearing reduces wrist droop.
Snap-on cover eliminates inconsistencies in setup and increases bearing life.
Enclosed bearings reduce particle escape and potential contamination of wafers.
2-bearing pivot assembly decreases future replacement costs as compared to 4-bearing OEM design.
Durability of ceramic bearings and stainless steel races allow for 3+ years of use without replacement or repair.
Tightness of x-style bearing reduces wrist droop.
Includes a 2 year warranty.
Available for AMAT HP®, HP+, VHP® and VHP+
150mm and 200mm robots.
HP and VHP are registered trademarks of Applied Materials, Inc.

7. Increased spring force keeps the hub assembly vertically
Hybrid ceramic bearings increase product life span and reduce particles.
Integral shields increase race stiffness and help retain lubricant to further reduce particles.
Patented stainless steel hub spacers provide stiffness against twisting and distorting.
Increased spring force keeps the hub assembly vertically
aligned to ensure bearing stability and reduce robot droop.
Upper and lower bearing spacers are pinned together to
eliminate lateral motion during robot.
Upper and lower motors are locked in place to eliminate
motor jumping and twisting and improve repeatability.
For 150mm and 200mm HP® and HP+ robots.
HP is a registered trademark of Applied Materials, Inc.

8. High-performance, long-life grease is compatible with
Bearings consist of ceramic load-bearing balls with smaller stainless steel spacer balls for durability.
Races are made from hardened 440 stainless steel to reduce wear and increase product life.
Shields help to retain lubricant within the bearing to further reduce particle contamination.
High-performance, long-life grease is compatible with
high-vacuum environments and a wide range of
process chemistries.
Available for AMAT VHP® and Producer®
200mm and 300mm robots.
VHP and Producer are registered trademarks of Applied Materials, Inc.

9. Features an improved shaft and bearing spring preload mechanism.
Wave spring gives consistent and even force to the bearings, resulting in longer bearing life and decreased droop.
Fixed spring cap eliminates tension adjustment and setup variability.
Includes a 2 year warranty.
Available for AMAT HP and HDP and robots.
High-quality elbow bearings kits are available
For HP+ and VHP+ robots.

10. Preventive maintenance (PM) is eliminated.
Designed to improve yield and productivity in Endura® and Centura® platforms.
Patented interconnected stainless steel bands replace interlocking pivot gears, improving reliability and wafer placement repeatability.
Preventive maintenance (PM) is eliminated.
Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particles from entering the process environment.
Compatible with 300mm VHP® and XP® robots.
Centura, Endura, VHP, and XP are registered trademarks of Applied Materials, Inc.
OEM WRIST
FABWORX WRIST

11. 150mm, 200mm and 300mm end effectors available
Three replaceable perfluoroeslastomer o-rings provide exceptional coefficient of friction to eliminate wafer sliding and associated particles.
O-rings are rated for process temperatures up to 485*C.
Location of o-rings removes the topographical stress normally caused by wafer bowing when a wafer is supported by its outside diameter.
Available in designs suitable for the buffer or transfer chamber.
A variety of end effector materials are available, including stress-free 6061 aluminum, alumina-ceramic coatings, Titanium and molybdenum.

12. Fabworx Solutions designs and manufactures yield and productivity improvement products for existing fab equipment.
Our product roadmap is driven by our customer’s tool issues an we have developed efficient methodologies for working with them on new products.