1. 기능성 산화물 박막 기술 Scanning Probe Microscope
나노 기술
기능성 산화물 박막 기술
Scanning Probe Microscope
2002년 5월 23일 송태권

2. 참고 자료 나노연구소 http://designwith.net/nano/?t=home
Handbook of Nanostructured Materials and Nanotechnology

3. Nano?
Macro vs. Micro

4. Nano vs. Micro

5. Two ways in Nanotech. New function in nano-scale Not just size
Bottom-up
Nanotube, Semiconductor Quantum Dots
Top-down
Nanoparticles, Nano-sized powders

6. Gate Oxide/Memory Capacitor

7. MEMS or NEMS (Nano-Electro-Machining System)

10. Metal Oxide Thin Films

11. Perovskites Ferroelectric Optical Magnetic Conductive
High TC Superconductive
Transition Metal Oxides
; Multi-valence

12. Ferroelectric Ti, Zr, Nb, Ta Oxides BaTiO3, Pb(Zr,Ti)O3, Bi4Ti3O12,
La-Bi4Ti3O12, SrBi2Ta2O9
DRAM
FRAM(Ferroelectric RAM)
IR detector

13. DRAM Application
High Density → Small Area → Complex Structure → High e

14. Optical Nb, Ta Oxides LiNbO3, LiTaO3 SAW (Surface Acoustic Wave)
Non-linear Optics
Optoelectronics

15. Magnetic Mn, Co, Fe Oxides (La,Sr)MnO3 Magnetic Head (CMR)
Magnetic Memory (MRAM)
Spintronics

16. Conductive
Cu, Co, Ti Oxides
(La,Sr)CoO3
Interconnect

17. HTSC(High TC Superconductive)
Cu Oxides
YBa2Cu3O7-d
Joshephson Junction
SQUID
Bolometer

18. Detailed Topics Oxygen Vacancy Reduction Multifunctional Devices
Multilayer
Films
Oxide
Superlattices
High Density
Devices
Nano-Technology
Strain Control

19. Schematic of a FIOH Transparent Electrode (ITO)
Pyroelectric (BSN, PLZT)
Ferroelectric (BT, PZT)
CMR Material (LSMO, LCMO)
Oxide Substrate
Photon; hn
Monolithic Oxide Integrated Circuit
Light hn
Pyroelectric
DP (DT)
Ferroelectric
DP (DT)
CMR Material DR
Data
Storage
Retrieving
Data
Signal Sensing
& Transformation

20. GMR vs. CMR Giant Magneto-Resistance Colossal Magneto-Resistance
in Magnetic Metal Multilayers(Superlattices)
Colossal Magneto-Resistance
in Magnetic Oxides

21. Applications of Ferroelectric Thin Films

22. Thin Film Deposition PVD (Physical Vapor Deposition)
PLD (Pulsed Laser Deposition)
Sputtering
CVD (Chemical Vapor Deposition)
MOCVD
Sol-gel

23. Pulsed Laser Deposition

24. Ion Substitution Effects

25. Strain Effects

26. Scanning Probe Microscope
STM (Scanning Tunneling Microscope)

27. Piezo-Micro-Manipulator

28. AFM (Atomic Force Microscope)
Non-conductive Materials like Dielectrics
In Air →
Easy to Use

29. SCM (~ Capacitance ~)
Resonance
Frequency

30. Applications of SCM - I
Semiconductor MOSFET

31. Applications of SCM - II
Memory Application

32. EFM(Electric Force Microscope)

33. EFM – Ferroelectric Domain

34. MFM (Magnetic Force Microscope)

35. MFM-Hard Disk Surface