1. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes MEMS Devices The MEMS(Microelectromechanical systems) devices can be made through the IC Process: Bulk micromachining: Pressure sensor Surface micromachining: Accelerometer http://www.youtube.com/watch?v=ZuE4oVrtEQY

2. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Bulk micromachining Mask pattern by SiO 2 or Si 3 N 4 Etching silicon substrate

3. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Acceleration and Pressure sensor

4. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Pressure Fabrication steps for pressure sensor

5. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Thermal Ink-jet printer

6. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Surface micromachining Micro-cantilever 1.Silicon substrate, Si 2.Deposit silicon nitride, Si 3 N 4 3.Grow silicon oxide, SiO 2 4.Pattern by Lithography 5.Deposit polysilicon 6.Remove SiO 2 by Etching

7. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Accelerometer for airbags Acceleration  Displacement of beam  Capacitive change  Turn on the airbag

8. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Micromirror Device

9. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Comb Drive / Capacitive Parallel Plate Capacitor C = ε A/d Electrostatic Force Fe = ½ ε (A/d 2 )V 2

10. © Pearson & GNU Su-Jin Kim MEMS Manufacturing Processes Nanoscale Manufacturing Parts are produced at nanometer(10 -9 ) length scales. Integrated circuits are at this length scale. Carbon nanotubes have high strength and electrical current-carrying capability. Carbon nanotubes: http://www.youtube.com/watch?v=zQAK4xxPGfMhttp://www.youtube.com/watch?v=zQAK4xxPGfM Nano tech: http://www.youtube.com/watch?v=sITy14zCvI8 (10min)http://www.youtube.com/watch?v=sITy14zCvI8