1. Slide # 1 ELCT 774: Advanced Semiconductor Characterization Dr. Goutam Koley Room 3A12, 777-3469, koley@engr.sc.edukoley@engr.sc.edu Lecture Hours: Mon & Wed 11.15 AM – 12.30 PM SWEARINGEN 2A24 Office Hours: By appointment only Other information: To be posted on the website

2. Slide # 2 Course Information Objective: To learn advanced semiconductor materials charcaterization techniques (special emphasis on nanoscale materials) Reference books: Semiconductor measurements and Instrumentation: W. R. Runyan and T. J. Shaffner, Second Edition, McGraw Hill, 1998. ISBN 0070576971 Semiconductor material and device characterization, Dieter K. schroder, 2 nd Edition, John Wiley and Sons, New York, 1998, ISBN # 0471241393 Other notes and handouts will be given from time to time, or references posted on the course website

3. Slide # 3 Schedule and Grading Grading:Midterm:30 % Final:30 % Project presentation and report40 % Class: Aug 22 – Nov 30, 29 lecture days Final Exam Week: Dec 5 - 12 Approximate Grades: A 90 - 100 B+85 - 89 B80 - 84 C+75 - 79 C 70 – 74 D+ 65 – 69 D 60 – 64 F <60

4. Slide # 4 Course Contents 1  Hall measurements and mobility (2)  Optical characterization (2)  Photoluminescence  Cathodoluminescence  Scanning probe microscopy (4)  Atomic force microscopy  Scanning tunneling microscopy  Scanning electron microscopy (2)  Basic principles  Electron beam induced current mapping  Cathodoluminescence

5. Slide # 5 Course Contents 2  Transmission electron microscopy (2)  Modes of operation  Scanning TEM  Selective area diffraction  Auger Electron Spectroscopy  Secondary Ion Mass Spectrometry  Special characterization techniques for nanoscale structures (3)  Energy dispersive X-ray Spectroscopy  Focused Ion Beam technique  Raman spectroscopy  Discussion on Graphene: the new nanomaterial

6. Slide # 6 Class schedule Lectures: 14 -15 Classes Midterm: 1 Class Lab visits: 3 – 4 Classes (2 AFM, 1 or 2 SEM, 1 Raman) Student Presentations: 8 Classes Final review: 1 class Note: A project report must be submitted by each of the students at the last day of classes (final review day)

7. Slide # 7 Project descriptions Projects must be related to Nano List of projects 1.Nanostructure characterization using STM 2.Atomic force microscopy applications to Nanotechnology 3.Nanowire characterization using SEM micro- characterization (SEM, CL, EBIC, EDX) 4.Nanowire characterization using TEM micro- characterization (STEM, SAD, EDX)

8. Slide # 8 Project descriptions 2 5. Nanoelectromechanical resonator characterization using SEM and TEM 6.Carrier Mobility in Nanowires/Graphene 7.Optical characterization of Nanostructures 8.Mechanical characterization of nanostructures 9.Graphene characterization and applications 10.Characterization of Nanowires using special AFM associated modes (surface potential, capacitance, current-voltage, etc.)

9. Slide # 9 Mobility 1 1.At high electric field, the velocity of electrons CANNOT increase linearly with voltage due to increased scattering from the lattice vibrations (electron loses the entire extra energy from electric field immediately) 2.At a particular electric field called the critical electric field, the mobility becomes almost zero (actually not defined anymore), and the velocity of the electrons become almost constant w.r.t. the electric field Slope gives the mobility only at low electric field Electron drift velocity saturates at high electric fields for Si. is valid only at low field Mobility represents the ease of electrons and holes to flow through the crystal under an externally applied electric field.