1. CERN Rui de OliveiraTS-DEM Rui de Oliveira TS-DEM Large size detectors CERN TS-DEM-PMT Capabilities

2. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

3. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

4. CERN Rui de OliveiraTS-DEM Raw material Single side Copper patterning Chemical Polyimide etching Chemical Copper reduction Chemical conical single mask

5. GEM production 2 meter x 450mm 100 meter x 500mm100 meter x 600mm2 meter x 600mm Resist development Resist laminationUV exposureRaw material Copper etchPolyimide etchMicro-etch Drying GEM

6. CERN Rui de OliveiraTS-DEM 650mm Biggest GEM produced this year 2 GEMs glued together

7. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

8. CERN Rui de OliveiraTS-DEM Quality control Microscope optical measurement –on several points on the GEM –Copper hole : 70 ± 2 μm –Polyimide hole: 55 ± 5 μm High voltage test –< 10nA @ 600V for 100mm x 100mm –@ 35%HR max And… *new* Light Transmission measurement

9. CERN Rui de OliveiraTS-DEM Good quality GEM A: 70 μm copper hole, 47 μm polyimide hole Transmission = 9.5% ± 0.5% max over all surface Bad quality GEM B: 83 μm copper hole, 55 μm polyimide hole Transmission = 13.5% ± 4% max over the all surface Light transmission measurement

10. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

11. CERN Rui de OliveiraTS-DEM Read-out board Laminated photoimageable coverlay Frame Stretched mesh on frame Laminated photoimageable coverlay Exposure, development and curing Micromegas Bulk

12. Stretched mesh 1500 x 500 Laminator 600 x 1500Exposure 2000 x 600 Development 600 x1500 Milling 1500 x 600 Oven 1500 x 500 Detector 1500 x 500 With present equipment

13. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

14. CERN Rui de OliveiraTS-DEM Detector Probe needles Locating pins Test: current < 20 nA @ 800V @ 35% HR max No standard tool for test! QUALITY CONTROL Bed of nails

15. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

16. CERN Rui de OliveiraTS-DEM Raw material CNC drilling Electrodes etching Small rim if needed Copper THGEM production description

17. CERN Rui de OliveiraTS-DEM Raw material: 2000mm x 1000mm Drilling area: 700mm x 600mm –Drilling cadence: 1 hole per second –Tool life: 10000 holes with 2 sharpenings Small rim etching: 1500mm x 800mm Electrode patterning: 2000mm x 600mm Possible Detector size: 700mm x 600mm -116 hour drilling time for 1mm pitch with 1 head drilling machine Practical limits ThGEMs at CERN

18. CERN Rui de OliveiraTS-DEM Contents Large size GEM –Process and present limitations at CERN –Quality control Bulk Micromegas –Process and existing equipment possibilities at CERN –Quality control THGEM –Process and present limitation at CERN Read out boards –Structure and limitation at CERN Conclusions

19. CERN Rui de OliveiraTS-DEM Read-out board Single sided: 2000mm x 600mm Double sided: 1500mm x 400mm Multi-layer: 600mm x 500mm!

20. CERN Rui de OliveiraTS-DEM Conclusion CERN capabilities (2008) GEM: 2.0 meter x 450 mm Micromegas Bulk: 1.5 meter x 500 mm ThGEM: 0.7 meter x 600 mm Read-out board: 0.6 meter x 500 mm for multi-layer!