1. The Plasma Physics and Radiation Technology master programme is managed by three groups organizing the four main themes: o Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden) o Elementary processes in Gasdischarges (Prof. G.M.W. Kroesen) o Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen)

2. The master track Plasma Physics and Radiation Technology The track embraces subjects such as: o the generation of plasma’s (including Nuclear Fusion), o plasma-surface interaction (e.g. plasma deposition, plasma etching, etc.), o plasma-accelerators, o laser cooling techniques and atomic optics o ion beam applications. An important characteristic of the master track is the fundamental approach of the themes as well as the research into new applications of this broad field of research.

3. General outline of the Master programme 1 st year 60 ECTS 11 optional courses 33 ECTS Multidisciplinary project 8 ECTS ExternalAssignment 19 ECTS 2 nd year 60 ECTS Graduation project 60 ECTS optional courses: each student has to choose a well-balanced set of courses to a total of at least 33 ECTS points (about 11 courses); interdisciplinary project of 8 ECTS points (6 weeks); external assignment project of 19 ECTS points (12 weeks) usually outside TU/e; graduation project of 60 ECTS points (1 year).

4. 3P230 Nuclear FusionN.J. Lopes Cardozo 3P160 Advanced Plasma PhysicsM.C.M. van de Sanden 3N260 Physics of High Temperature PlasmasT.J. Schep 3P100 Molecular collisonsH.C.W. Beijerinck 3P140 Lasers in physical experimentsH.C.W. Beijerinck 3P190 Laser cooling: theory and experimentE.J.D. Vredenbregt Numerical Simulation of PlasmasJ.J.A.M. van der Mullen 3P200 EllipsometryG.M.W. Kroesen Gas dischargesM. Haverlag KosmophyisicsJ.J.A.M. van der Mullen 3P110 Introduction to Plasma PhysicsR.A.H. Engeln Plasma processing: science and applicationsW.M.M. Kessels 3P220 Molecuul-oppervlak-interactie en vacuümtechniekM.C.M. van de Sanden 3K100 Optics of charge particlesJ. Botman 3K110 Physics of Particle acceleratorsJ. Botman 3K120 Nuclear Analysis techniquesL. van Ijzendoorn 3K140 Radio-isotopes and ionizing radiationP. Mutsaerts Conversion of electron energy to radiationM. van der Wiel Master track courses:

5. The three research programmes : Equilibrium and Transport in Plasmas (Prof. M.C.M. van de Sanden/Prof. D.C. Schram) Expanding plasmas and molecule formation Plasma surface interaction and atomistic simulations Plasma synthesis of thin films, nanostructures, and devices Nuclear Fusion (Rijnhuizen) Elementary processes in Plasmas (Prof. G.M.W. Kroesen) Non-equilibrium effects Plasma modelling and Self-organisation in plasmas Lighting, environmental applications Biomedical Applications Coherence and Quantum Technology (Prof. K.A.H. van Leeuwen) Ultrahigh-gradient electron accelerator concepts Nanostructure fabrication by laser manipulation Atom optics/atom interferometry with ultracold atoms Atom traps: ultracold plasmas and BEC’s

6. Coherence & Quantum Technology (CQT) Ultra-Cold Electron & Ion Beams: Laser cooling & trapping; Femtosecond (10-15 s) laser physics; Ultra-low temperature (0.001 - 10 kelvin) plasmas; Femtosecond electron microscopy; Sub-nanometer ion beam drilling & milling. Edgar Vredenbregt, Jom Luiten, Peter Mutsaers Extreme states of matter: Ultra-cold & ultra-hot, plasmas & gases; Laser Manipulation of atoms, electrons and ions; Atom, electron & ion beams for femto-nano science & engineering.

7. Theory of Quantum Gases: Atoms trapped in an optical lattice; Superfluidity of ultra-cold (nano-kelvin) Fermi and Bose gases; Quantum Plasmas & Beams. Servaas Kokkelmans Plasma Laser Wakefield Acceleration: Tera-watt “light bullet” laser physics; Extreme high-energy-density plasmas; Giga-electron-volt acceleration in a few cm. Seth Brussaard

8. Standing light wave Atom beam Substrate Nano Brush: Manipulation of atomic beams with light; Atom lithography; Deposition of magnetic nano-structures. Ton van leeuwen

9. EPG Elementary Processes in Gas Discharges Staff: –Prof.dr.ir. G.M.W. Kroesen –Prof.dr. J.J.A.M. van der Mullen –Dr.ir. W.W. Stoffels –Dr.ir. E.M. van Veldhuizen –Prof.dr. U. Ebert –Prof.dr. M. Haverlag

10. Elementary Processes in Gas Discharges (EPG) Light and photons: Efficient lamps and EUV sources Environmental technology: using plasmas for air / water cleaning Biomedical technology: sterilisation; new medical treatments New energy sources: hydrogen technology; dusty plasmas

11. Plasmas: Heaven and earth

12. Plasmas in lab and industry (1)

13. Plasmas in lab and industry (2)

14. Prof. dr.ir. Richard van de Sanden Dr. Richard Engeln Dr.ir. Erwin Kessels Dr. Adriana Creatore (8 postdocs; 15 PhD students; 8-12 BSc/MSc students; 5 technicians) Science & Technology of Plasma & Materials Processing http://www.phys.tue.nl/pmp

15. Research activities Physics and chemistry of plasma & materials processing Micro- and nano-engineering of functional materials Advanced plasma and surface diagnostics Plasma chemistry Ion/radical densities/fluxes Energy distribution fcts. Plasma surface interaction Plasma enhanced CVD Dry etching Plasma-assisted ALD Thin films & devices Ellipsometry Nonlinear surface spectroscopy Novel surface diagnostics (Laser) based gas phase diagnostics

16. Research issues: Plasma-materials processing Low temperatures More freedom and larger parameter space oPrecursors, Material properties oPlasma-assisted ALD (conformal TiN diffusion barriers, tunnel barriers) Reactive species created in gas phase oHigher reactivity oProcess independent of substrate oHigh throughput/large area processing (e.g. solar cells) oCompatibility with substrates/devices oOrganic and polymer devices (encapsulation of OLEDs) rf plasma Self-bias/Ion bombardment oManipulation of ion energy distribution function oNovel synergistic effects oEtching of high-aspect ratio structures: ion/neutral synergism