1. Presenter: Prof. David Garmire Agenda Minutes 1. Goals of the course 15 2. Overview of material 20 3. Grading 10 4. Time change 5 Microsensors & Microactuators Lecture 1: Introduction

2. Microsensors and Microactuators ?

3. Sandia National Labs

4. Microsensors and Microactuators ? Texas Instruments DLP Technology

5. Microsensors and Microactuators ? biomechanics.ecs.umass.edu

6. Microsensors and Microactuators ?

7. Courtesy Clark T.-C. Nguyen

8. Why go micro/nano ? Courtesy Clark T.-C. Nguyen

9. Goals of the Course Understand advantages/challenges of scaling down Design your own Microsensors and Microactuators  Microelectromechanical Systems (MEMS) Model and simulate various domains of interest  Mechanical, Electrical, Magnetic, Fluidic, Thermal, Optical  Interactions between domains Understand methodologies to test devices  Sources and distributions of noise  Measurement circuits and methodologies Iterate upon and optimize designs

10. Overview of Course Material Knowledge Areas Electrical Engineering Mechanical Engineering Computer Science Material Science Mathematics Application Knowledge Gaming Cell phones Displays Printers Navigation Medicine Surgery Safety Energy Textiles Physics Biology Chemistry Bioengineering Chemical Engineering

11. Overview of Course Material Design Process 1. Problem Description 2. Choose Domains and Materials 4a. Develop Simplified Model of Design Space 4b. Create Finite Element Simulation of Specific Designs 3. Examine Initial Design Space 5. Layout Design with Parameterization for Testing 6. Fabricate Devices 7. Test Devices

12. Grading Homework Assignments25% Take-home Exam30% Final-Project Writeup30% Final Presentation15%

13. Rescheduling Class Monday, Wednesday 11:00 – 12:30 ? Tuesday, Thursday ? Wednesday, Friday 11:00 – 12:30 ?

14. Reading Assignment for Next Class Chapter 1 in Micromachined Transducers Sourcebook by G. T. Kovacs

15. First Homework Assignment Bridge Building  Use a single 11 by 8.5 inch sheet of paper  You may cut and fold the paper Suggestion: Print a pattern from the computer  Use not more than 1 foot of standard Scotch tape  Double-sided or single-sided OK  Optimize for one of the following  Longest suspension that can hold a single penny in the center  Strongest suspension spanning 1 foot Holds the most pennies placed at least 1 inch from the sides  Most earthquake resistant suspension spanning 2 feet Holds the most pennies placed at the center when shaken Due in approximately 3 weeks.