1. 15/07/2010Rui De Oliveira1 Update on large size GEM manufacturing Rui de Oliveira

2.  Process  Characterization  Some pictures  Large volume production outside CERN 15/07/2010Rui De Oliveira2

3. 15/07/2010Rui De Oliveira3 Chemical Polyimide etching Second Polyimide etching Copper electro etching Stripping reality

4. 15/07/2010Rui De Oliveira4 connected Non etched Top Electrode Lower voltage than the Chemical reaction +3V Resist layer +3V0V Bath at +3V -everything at ground will be protected -everything at +3V will be chemically etched - An example of active corrosion protection

5. Starting structure

6. Conventional isotropic metal etching

7. The hole is created but still an angle in the copper

8. With over etch

9. Going back to Polyimide etching for 30 sec The hole become bi-conical

10. 10

11. 11 TOP BOTTOM

12. 12 TOP BOTTOM

13. 13 TOP BOTTOM

14. 14 TOP BOTTOM Sample 1 Sample 2

15. 15 TOP BOTTOM Sample 3 Sample 4

16. 16 Drift GEM Anode 3.05 mm 2.15 mm GEM active area: 10 x 10 cm 2 Gas mixture: Ar/CO 2 70/30 Gas flow: ~ 5 l/h Water content: ~ 100 ppm H 2 O Radiation source: Cu X–ray tube

17. 17 Run_0110 Both GEMs in “open–bottom” config E d = 2 kV/cm E i = 3 kV/cm DV GEM = 480 V Energy resolution = 18.4 % FWHM/peak @ 8.04 keV Run_0104 Both GEMs in “open–top” config E d = 2 kV/cm E i = 3 kV/cm DV GEM = 480 V Energy resolution = 19.5 % FWHM/peak @ 8.04 keV

18. 18 E d = 2 kV/cm E i = 3 kV/cm Rate bottom ~ 21 kHz/mm 2 Rate top ~ 18 kHz/mm 2 Spark V bottom ~ 540 V Spark V top ~ 530 V Max G bottom ~ 1390 Max G top ~ 1080

19. 19 Drift GEM3T Anode 3.25 mm GEMs active area: 10 x 10 cm 2 Gas mixture: Ar/CO 2 70/30 Gas flow: ~ 5 l/h Radiation: Ag X–ray tube, Cu filter 2D (X–Y) readout, all strips shorted GEMs in open–bottom configuration HV provided by voltage divider 2 HV filters on the line (600 k  total) GEM3B GEM2T GEM2B GEM1T GEM1B 2.215 mm 2.225 mm 2.15 mm

20. 20 E d = 2.09 kV/cm DV GEM1 = 391 V E t1 = 3.09 kV/cm DV GEM2 = 354 V E t2 = 3.08 kV/cm DV GEM3 = 309 V E i = 3.19 kV/cm Rate ~ 2.9 kHz Energy resolution=20.6% FWHM/peak @ 8.04 keV

21. 21 E d ~ 2 kV/cm E t1 ~ 3 kV/cm E t2 ~ 3 kV/cm E i ~ 3 kV/cm Rate ~ 420 kHz

22. 22 Cu X–rays 2 mm ø collimator Ni #1 absorber DV div = 4200 V gain ~ 2560 rate = 300 Hz T = (2000 ± 900) s DG = (1.7 ± 0.2) %

24. 15/07/2010Rui De Oliveira24

25. 15/07/2010Rui De Oliveira25

26. 15/07/2010Rui De Oliveira26