1. NanoRelay Pros: High Ion:Ioff Excellent Ioff Robust to temperature/radiation Embedded memory (hysterisis) Potential for RF device and sensor and hybrid circuit Simple base structure Cons: Difficult to scale to low voltage Hermetic packaging Bounce/settling time Stiction Reliability at surface of contact Hot switching

2. Energy Reversible Relay Pros: Potential for Low voltage “Soft landing” High Ion:Ioff Excellent Ioff Robust to temperature/radiation Embedded memory (hysterisis) Potential for RF device and sensor Simple fab process Cons: Hermetic Packaging Only demonstrated at larger scales AC “reset” required for low voltage operation

3. NEMFET Pros: High Ion:Ioff Better Ioff (not as good as relay) Potential for RF and sensor No mechanical contact Potential for 1 ns response Cons: Oxide charging Process control Hermetic package Tradeoffs required to achieve high conducting state speed Advantage over FET for benefit?