1. NATIONAL NANOFABRICATION CENTRE CLEANROOM ADMINISTRATIVE COMMITTEE MEETING TUMS Murthy 27 Mar 2012

2. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Agenda  Infrastructure installation and commissioning  Utilities  Fab Equipment  Operations  Operation procedures and protocols  User Training  Preventive and Breakdown Maintenance ; Planning for Consumables, spares etc  Manpower

3. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Utilities  All the utilities have been installed and commissioned  Following utilities did not meet the specifications and need modification  Dry exhaust and dry scrubber  BMS  Systems that have not been tested  Wet Scrubber  Humidifier  Sprinklers

4. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Utilities contd.  Utilities that need upgrading or enhancement  Heat and smoke detector system. System to be upgraded to an addressable system  Biometric access for staircase to Mezzanine floor  Walkie-talkies for communication among fab and utilities staff  Utilities under installation  Borewell water treatment plant

5. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Nanofab Tools  Litho  All tools installed and commissioned E-line vibration isolation to be installed  Plasma processing  All tools installed and commissioned  Wet procesing  3 out of 6 benches have been installed Replacement for broken Quartz baths received. Waiting for installation engineer from Felcon to arrive to complete installation

6. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Nanofab Tools  Films  One sputter tool working  Waiting replacement spares and Tecport Engineer’s schedule for commissioning one more sputtering system and Ebeam evap system  Furnaces  LPCVD 3 tubes working  Problems with other tubes and the wet scrubber to be resolved

7. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Operations  Operation procedures and protocols  Safety related  Equipment operation procedures  User Training  Training schedules under preparation  Utilities maintenance the key to operations  Most critical systems out of manufacturer warranty  AMC with various manufacturers or with Ellipsiz

8. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Operations contd.  Manpower recruitment and training is a priority  For second shift staffing  For Nano Fab Equipment and process maintenance  Fine tuning, enhancement and preventive maintenance of utilities  Preliminary quote obtained for Employee Medical and Accident Group Insurance

9. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Other Issues  Electrical Distribution continues to be a worry with several unexplained incidents  Latest is the burnt contactors in the Capacitance Bank for power factor correction  Root cause of earlier incidents of MCB tripping (ref : POU 610 scrubber ) and Noise from UPS could not be found

10. TUMS MurthyCleanroom Admin Committee Meeting31 Jan 2012 Capacitance Bank damage Insulation Burnt