1. Bertrand Ardouin Thomas Zimmer Michael Schröter XMOD Technologies: Hicum toolkit & extraction services HICUM Workshop, June 6 - 7, Dresden

2. XMOD: Presentation How to choose a compact model ? Measurement, Extraction, Modelling Services and Consulting Hicum “Aperitif toolkit” Simple approach OUTLINE HICUM Workshop, June 6 - 7, Dresden

3. Who ? TEAM Bertrand ARDOUIN, PhD, University Bordeaux Laboratoire de Microélectronique IXL Thomas ZIMMER, Associate Professor, University Bordeaux, Laboratoire de Microélectronique IXL Michael SCHRÖTER, Professor, T. University Dresden, chair for electron devices and integrated circuits HICUM Workshop, June 6 - 7, Dresden

4. Where ? XMOD is here Laboratoire de Microélectronique IXL HICUM Workshop, June 6 - 7, Dresden not here

5. What ? Co-operation and support from :  Technical University Dresden  University Bordeaux A Start-up company in the Bipolar modelling domain :  Offering parameter extraction software  Provide extraction and modelling services (parameter extraction, on wafer measurements, …)  Hicum (SGP and VBIC models also supported)  Single transistor and scaling approach  Custom models for specific applications (HDL-A) HICUM Workshop, June 6 - 7, Dresden

6. What ? NWA HP 8510C (HF, CV) HP 4155B (DC) C-V meter HP 4284 (C-V) T controler -60 °C up to 200 °C Semi-automatic prober Karl Suss PA200 On wafer measurement capabilities HICUM Workshop, June 6 - 7, Dresden

7. What ? The “Hicum Aperitif Toolkit” Single transistor methodology “In House” ICCAP tools for complete parameter extraction HICUM Workshop, June 6 - 7, Dresden

8. Why ? Efficiency: ability to model complex technologies Simplicity: Time requirement = save money VBIC Gummel-Poon Hicum Advanced compact models Mextram HICUM Workshop, June 6 - 7, Dresden

9. Why ? Efficiency: ability to model complex technologies Simplicity: Time requirement = save money VBIC Gummel-Poon Hicum Advanced compact models Mextram HICUM Workshop, June 6 - 7, Dresden

10. Why ? Efficiency: ability to model complex technologies Simplicity: Time requirement = save money VBIC Gummel-Poon Hicum Advanced compact models Mextram HICUM Workshop, June 6 - 7, Dresden

11. Why ? Efficiency: ability to model complex technologies Simplicity: Time requirement = save money VBIC Gummel-Poon Hicum Mextram HICUM Workshop, June 6 - 7, Dresden

12. Why ? Efficiency: ability to model complex technologies Simplicity: Time requirement = save money VBIC Gummel-Poon Hicum Mextram Scalability and Physical meaning not taken into account Single transistor strategy HICUM Workshop, June 6 - 7, Dresden

13. Why ? HICUM Workshop, June 6 - 7, Dresden There’s a need for companies in this domain:  Help to accelerate the FIRST use of Hicum and help to establish a wide use  Provide complete extraction services for companies having no experience in the bipolar domain (SiGe)  Provide consulting for modelling very High frequency devices, need of scaling, modelling precision, statistics, temperature,... Centralise Bipolar experience

14. Goals of the “Hicum Aperitif Toolkit” ? Hicum Gummel-Poon Switch Learn a new model and new tools Complex scaling approach New test structures on the wafers HICUM Workshop, June 6 - 7, Dresden

15. Goals of the “Hicum Aperitif Toolkit” Hicum Gummel-Poon Switch “Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like) Decouple Scaling from parameter extraction No specific test structures Simplified approach HICUM Workshop, June 6 - 7, Dresden

16. Goals of the “Hicum Aperitif Toolkit” “Hicum Aperitif Toolkit” allows to: A smooth transition from SGP to Hicum Obtain efficient and physically meaningful parameter sets for Hicum (from direct extraction) Evaluate Hicum without too much effort HICUM Workshop, June 6 - 7, Dresden

17. Description of the toolkit Probes ICCAP measurements toolkit Instruments Standard Bipolar Measurement Database Hicum “Aperitif” Toolkit ICCAP Gummel-Poon, VBIC, MEXTRAM TRADICA and BIPAX HICUM Workshop, June 6 - 7, Dresden

18. Description of the toolkit ICCAP« Hicum aperitif Toolkit » New GUI interface HICUM Workshop, June 6 - 7, Dresden

19. Description of the toolkit Main window Import data Define Select mdm file + view header Simply select directory Import HICUM Workshop, June 6 - 7, Dresden

20. Description of the toolkit Temperature Comments on technology Define things

21. Description of the toolkit Extract Extraction steps Parameter group Edit parameters Status Run HICUM Workshop, June 6 - 7, Dresden

22. Description of the toolkit Export Results Export Directory Utilities Create HTML documentation HICUM Workshop, June 6 - 7, Dresden

23. Description of the toolkit Optimize Get from plots Tune HICUM Workshop, June 6 - 7, Dresden

24. Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

25. Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

26. Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

27. Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

28. Description of the toolkit HICUM Workshop, June 6 - 7, Dresden

29. BiCMOS SiGe 0.35 µm ST Microelectronics f T = 45 GHz Parameter extraction: Results f T (I c )  (V ce ) HICUM Workshop, June 6 - 7, Dresden

30. Parameter extraction: Results Ic (Vce) I c (V be ), I b (V be ) BiCMOS SiGe 0.35 µm ST Microelectronics f T = 45 GHz HICUM Workshop, June 6 - 7, Dresden

31. Parameter extraction: Results BiCMOS SiGe 0.35 µm ST Microelectronics f T = 45 GHz HICUM Workshop, June 6 - 7, Dresden g 0 = d I C / dV ce

32. Parameter extraction: Results f T (Ic) BiCMOS SiGe 0.25 µm ST Microelectronics f T = 75 GHz HICUM Workshop, June 6 - 7, Dresden

33. Parameter extraction: Results BiCMOS SiGe 0.25 µm ST Microelectronics f T = 120 GHz HICUM Workshop, June 6 - 7, Dresden

34. Conclusion XMOD provides Software, Consulting and Services for Bipolar Modelling community “Hicum Aperitif Toolkit” is ready for evaluation Simplified approach allows to familiarise with the model and extend its interest Scaling and statistics planed HICUM Workshop, June 6 - 7, Dresden