1. NC Applications in Manufacturing GSNU

2. GSNU- Dept. of Mechanical and Aerospace Engineering CMP (Chemical Mechanical Polishing) Toyoda Float Polishing Machine Table Speed: 100 RPM Wafer Carrier Speed: 75 RPM Down Pressure: 5 psi Polishing plate Wafer carrier

3. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Process Setup Side view Wafer carrier view Polishing ToolStrasbaugh 6EC Wafers5 Patterned Oxide Pressure(3, 5, 8) psi Table/Carrier Speed(30/27, 50/45, 80/72) rpm Slurry TypeCabot Semi-sperse D7000 Slurry Flowrate150 ml/min Elapsed Polish Time(15, 60 Seconds) Relative Hersey Number (0.8, 1.2, 2.1, 3.5, 5.6)

4. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Wafer-Pad Contact Small Film Thickness Increasing Line Density Large Film Thickness

5. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering 고에너지빔 공정 레이저빔 (LBM) 전자빔가공 (EBM) 플라즈마빔가공 (PBM)

6. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering 레이저빔가공 레이저빔가공 (LBM) Laser Beam Machining (1) 정확도, 반복도, 자동화의 용이성 (2) 광섬유의 활용으로 유연화 (3) 간단한 고정구, 짧은 설치시간, 컴퓨터제어 (4) 사용에 주의

7. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering (1) 전자, 자동차산업 – 절단, 드릴링 (2) 용접작업 (3) 표면처리 (4) 마킹

8. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering

9. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering cutting welding Cladding( 피복 ) Heat treating

10. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering perforating Marking-rubber kiss-cutting engraving Applications

11. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Web-processing showerhead slitting Applications

12. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering NC Control

13. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Laser - Galvanometer Control

14. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Backlight Unit Patterns 가공 영역 : 13”, 14”, 15” 등 폭 : 50 ㎛ ~ 250 ㎛ 깊이 : 25 ㎛ ~ 125 ㎛ 프리즘 각도 : 90 도 가 광학적으로 이상적

15. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Groove Shapes : V-cut vs. Laser V-cutLaser

16. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Material Effect on Pattern 압출성형사출성형

17. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering SourceCO 2 Wavelength (  m ) 10.6 Output Power (W)0~50 Power Stability5% Beam Size (mm)0.34 Operation Mode Continuous Wave Mode QualityTEM 00 Power Supply AC200V+10%, 50Hz Power Consumption (kW) 2.2 Test Result

18. GSNU GSNU- Dept. of Mechanical and Aerospace Engineering Optical Properties - 인쇄 방식에 비해 약 2~3 배의 휘도 - 균일도는 패턴조정으로 달성가능