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Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Jean-Marie.

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Presentation on theme: "Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Jean-Marie."— Presentation transcript:

1 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Jean-Marie MACKOWSKI Université Claude Bernard Lyon 1 SMA-VIRGO Bât 213 22, Bd Niels Bohr 69622 Villeurbanne Cedex mackowski@ipnl.in2p3.fr Phone : + 33 04 72 43 26 69 Fax : + 33 04 78 89 19 36 Jean-Marie MACKOWSKI Université Claude Bernard Lyon 1 SMA-VIRGO Bât 213 22, Bd Niels Bohr 69622 Villeurbanne Cedex mackowski@ipnl.in2p3.fr Phone : + 33 04 72 43 26 69 Fax : + 33 04 78 89 19 36

2 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU COATING DEPOSITION TECHNIQUES VIRGO EXPERIENCE VIRGO METROLOGY & OPTICS PERFORMANCES LIMITATIONS SOURCES COATING DEPOSITION TECHNIQUES VIRGO EXPERIENCE VIRGO METROLOGY & OPTICS PERFORMANCES LIMITATIONS SOURCES

3 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations COATINGS DEPOSITION TECHNIQUES TODAY MENU

4 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations ION ASSISTED DEPOSITIONAD coating crucible substrat Assistance source Vapor flow material Electron beam, Joule effect, Laser, …

5 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations I.B.S. Deposition Principles

6 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations I.B.S. Deposition Systems

7 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations C.V.D Plasma Deposition Systems

8 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations FROM SOURCE TO SUBSTRAT SURFACE Source Temperature Emission law Medium pressure Substrat Temperature Vapor flow: nature, direction, energy Evaporation:0.1 eV (1100K)m.s -1 Sputtering:10 to 50 eV km.s -1

9 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Dimension: 2x2.2x2.2 m 3 Vacuum: 2.10 -8 mBar DIBS technology Environment: Class 1 VIRGO LARGE COATER

10 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations CLASS 1 CLEAN ROOM BEFORE INTEGRATION

11 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO LARGE COATER robot simple rotation

12 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 3.10 -3 with masking on  700 mm 6.10 -3 without masking on  350 mm COATING THICKNESS UNIFORMITY

13 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SiO2 Target Sputtered Atomes Mask Ion Source Mirror Interferometer Robot CORRECTIVE COATING

14 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 30 nm P.V. 0 14 nm P.V. 0 beforecorrection aftercorrection 6 nm R.M.S 1.5 nm R.M.S. CORRECTIVE COATING

15 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations IBS COATER  Absorption @ 1064 nm : 0.2 / 1 ppm  Process Difffusion @ 1064 nm : 0.6 / 4 ppm  Centring Wavelength repeatability : +/- 0.4 %  Wavefront after Corrective Coating : <1 nm  Absorption @ 1064 nm : 0.2 / 1 ppm  Process Difffusion @ 1064 nm : 0.6 / 4 ppm  Centring Wavelength repeatability : +/- 0.4 %  Wavefront after Corrective Coating : <1 nm

16 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU VIRGO EXPERIMENT

17 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGOVIRGO FRANC0-ITALIEN PROJECT 11 Laboratories 5 in France 11 in Italy 200 people 100 M€ Antenna Located at PISA FRANC0-ITALIEN PROJECT 11 Laboratories 5 in France 11 in Italy 200 people 100 M€ Antenna Located at PISA

18 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LASER YAG:Nd 3+ 20 W détecteur AR R<5.10 -4 MIRROR R=0.92 BS R=0.5 AR R<10 -3 AR R<5.10 -4 MIRROR R=0.88 MIRROR R=0.88 AR R<5.10 -4 MIRROR HR R=0.99995 MIRROR HR R=0.99995 DETECTOR 3 km MRMRMRMR M E2 M E1 M I2 M I1 B.S. VIRGO INTERFEROMETER

19 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO SITE

20 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO TUNNEL

21 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO CENTRAL BUILDING N W

22 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations VIRGO SUSPENSIONS

23 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Beam splitter

24 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU VIRGO METROLOGY & OPTICS PERFORMANCES VIRGO METROLOGY & OPTICS PERFORMANCES

25 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Bulk diameter : 350 mm Coating diameter : 330 mm Bulk Thickness : 96 mm FIRST VIRGO MIRROR

26 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Absorption Birefringence Relative reflexion Wave front (stitching) Scattering Transmission Microroughness Defect detection METROLOGY OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Université Lyon I SMASMA

27 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 28W CW YAG:Nd 3+ pump laser Mappings up to Ø400 mm Mesurement of the coating absorption … … as well as the bulk absorption ABSORPTION BENCH

28 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Sensitivity: 20 ppb 0,63  0.07 ppm Ø 150mm COATING ABSORPTION (VEM04) @ 1064 nm on Ø 150 mm

29 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Sensitivity: 30 ppb.cm -1 0,74  0.05 ppm.cm -1 Ø 150mm BULK ABSORPTION (VIM03) @ 1064 nm on Ø 150 mm

30 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Mesurement of the amplitude as well as the principle axis direction. Mappings up to Ø400 mm. losses due to birefringence in P or S polarisation (log 10 ) BIREFRINGENCE BENCH

31 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Amplitude. Sensitivity: 10 -5 rad.cm -1 Principle axis direction BIREFRINGENCE (VIM01) on Ø 150 mm

32 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SENSITIVITY:  R/R = 2.10 -5 RELATIVE REFLEXION BENCH

33 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations WAVE FRONT MEASUREMENT

34 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations WAVE FRONT (VEM04) on Ø 150 mm 3.8 mn RMS 29 nm PV Ø 150mm

35 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations STITCHING

36 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations STITCHING WAVE FRONT (VEM04) on Ø 280 mm 11.6 mn RMS 73.8 nm PV Ø 280mm

37 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SCATTERING MEASUREMENT

38 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 4 ppm 150  150 mm 2 75 -75 0 0 - 37.537.575 37.5 - 37.5 SCATTERING (VEM04) on 150  150 mm 2

39 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations 42.9  0.2 ppm Ø50mm TRANSMISSION (VEM04) on 150  150 mm 2

40 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MICROROUGHNESS DEFECT DETECTION MICROMAP

41 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations END MIRROR (VEM04) OPTICAL PERFORMANCES

42 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations TODAY MENU LIMITATION SOURCES OF PERFORMANCE LIMITATION SOURCES OF PERFORMANCE

43 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LIMITATION SOURCES SUBSTRATE (BULK) CHEMICALS USED FOR THE POLISHING PROCESS CHEMICALS USED FOR THE CLEANING PROCEDURE SPUTTERING TARGETS COATER WALLS ION SOURCES COMPONENTS GAZ USED FOR DEPOSITION PROCESS, … MATERIALS PURITY ENVIRONNEMENTAL CONDITIONS PARTICULATE CONTAMINATIONS ORGANIC CONTAMINATIONS BOXES FOR TRANSFERT & TRANSPORTATION

44 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations LIMITATION SOURCES MATERIALS PURITY & MATERIALS PURITY & ENVIRONNEMENTAL CONDITIONS CONTROL ENVIRONNEMENTAL CONDITIONS CONTROL PHYSICO-CHEMICAL ANALYSIS TOOLS LIKE : ESCA, RBS, AUGER, SEM, XTM, SIMS… PHYSICO-CHEMICAL ANALYSIS TOOLS LIKE : ESCA, RBS, AUGER, SEM, XTM, SIMS…

45 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations SIMS PRINCIPLES e- Acquisition Secondary Ions m/e Electron beam (flood gun) SAMPLE Common Ions Sources O +, Ar +, Cs +, Ga + … Magnetic Quadrupole Scintillator

46 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MIRRORS :SIMS PROFILES SiO2 Ta205 Na + 23 K + 39

47 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations Ta+Si+Ti+ MIRRORS :SIMS PROFILES

48 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations MIRRORS :SIMS PROFILES

49 Université Lyon I NATO/ASI and Euro Summer School September 16-27, 2002 JM.M SMASMA OPTICS IN ASTROPHYSICS Coatings Performances & Limitations CONCLUSION AT THIS STEP, OPTICAL LOSSES IMPROVEMENT AT THIS STEP, OPTICAL LOSSES IMPROVEMENT NEEDS BIG R&D EFFORTS

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