1. EST-DEM R. De Oliveira 20 Dec., ‘04 Production of Gaseous Detector Elements  History of Gas Detectors in Workshop  Fabrication of GEM Detectors  Fabrication of Micro-megas  Readout Circuits  Other Detectors

2. EST-DEM R. De Oliveira 20 Dec., ‘04 History of Gas Detectors in Workshop ‘96: first GEM about 50 x 50mm with a gain of 10. ‘97: first GEM 100 x 100mm with gain of 10000. ‘98 - ‘99: first GEM 400 x 400mm; 1D and 2D readouts; first micro-groove and micro-well detectors. ‘00: first 3D GEM readout; first 1D readout for Micro-megas in COMPASS. ‘01: first PIXEL GEM readout; first 2D Micro-megas readout. ‘03: first PIXEL Micro-megas readout.

3. EST-DEM R. De Oliveira 20 Dec., ‘04 Fabrication of GEM Detector  Theory of Operation  Cross-section of GEM  Manufacturing Process  Examples  GEM Capabilities  How to Buy a GEM? Around 500 GEMs produced per year in CERN.

4. EST-DEM R. De Oliveira 20 Dec., ‘04 Theory of Operation Electrode -3000V Gas GEM Readout board 2D 0V Lines X Particle trajectory 1 x e- 8000 x e- Top View Lines Y

5. EST-DEM R. De Oliveira 20 Dec., ‘04 Cross-section of GEM

6. EST-DEM R. De Oliveira 20 Dec., ‘04 Manufacturing Process Applying Resist Patterning Resist Image Transfer Copper Etching Resist Stipping Polyimide Etching and Cleaning Raw Material UV Exposure & Development Vacuum deposited copper on polyimide

7. EST-DEM R. De Oliveira 20 Dec., ‘04 Manufacturing Process  Image transfer with film pocket  Copper Etching in a Drawer Machine

8. EST-DEM R. De Oliveira 20 Dec., ‘04 Manufacturing Process  Polyimide Etching in a Static Bath with Temperature Control  Hole Shape Control Good Perfect Defect

9. EST-DEM R. De Oliveira 20 Dec., ‘04 Manufacturing Process  Electrode patterning  Cleaning  Electrical Test (Less than 10nA at 600V with humidity below 35%)

10. EST-DEM R. De Oliveira 20 Dec., ‘04 Examples 40 cm diameter28 x 28 mm active area 100 x 100 mm standard Ni/Au50 x 50 mm standard copper

11. EST-DEM R. De Oliveira 20 Dec., ‘04 Examples HERA-B Experiment (300 GEMs) COMPASS Experiment (100 GEMs) segmented Test for CMS, 45 cm long

12. EST-DEM R. De Oliveira 20 Dec., ‘04 Examples Fine segmentation test with printed polarization resistors

13. EST-DEM R. De Oliveira 20 Dec., ‘04 GEM Capabilities  Gem size : up to 450 x 450 mm 2  Hole diameter : from 25µm and up  Thickness of dielectric : 25, 50 or 100µm*  Platings : passivated copper, Ni/Au, Ni or Au  Spacers : from 1 to 3mm in multi GEM detectors * Material not in stock 300µm width, 2mm height

14. EST-DEM R. De Oliveira 20 Dec., ‘04 How to Buy a GEM? http://www.cern.ch/dem/products/gem  standard products :  100 x 100 mm active area  50 x 50 mm active area  with or without frame  passivated copper or Ni/Au  non-standard products : please contact the workshop

15. EST-DEM R. De Oliveira 20 Dec., ‘04 Fabrication of Micro-megas MicroMegas:  Theory of Operation  Manufacturing Process  Possibilities  Examples Bulk MicroMegas:  Manufacturing Process  Possibilities  Examples

16. EST-DEM R. De Oliveira 20 Dec., ‘04 MicroMegas: Theory of Operation Electrode -3000 V Frame Grill Readout circuit 0 V Spacer Particle trajectory e-Gas

17. EST-DEM R. De Oliveira 20 Dec., ‘04 MicroMegas: Manufacturing Process Image Transfer + Copper Etching Frame Gluing Polyimide Etching + Cleaning Raw Material

18. EST-DEM R. De Oliveira 20 Dec., ‘04 MicroMegas: Possibilities  Size of the grill :  max 40cm diameter  Bigger sizes under development  Pattern : mini 500 mesh, 1000 under study  Metals : copper, nickel, titanium  Spacers :  on the grill : 25 or 50µm thick (polyimide)  on the readout : from 50µm to 0.5mm (modified epoxy)

19. EST-DEM R. De Oliveira 20 Dec., ‘04 MicroMegas: Examples CAST Experiment (special Plexiglas frame) Zoom on polyimide dots on the grill KABES Experiment

20. EST-DEM R. De Oliveira 20 Dec., ‘04 Bulk MicroMegas: Manufacturing Process

21. EST-DEM R. De Oliveira 20 Dec., ‘04 Bulk MicroMegas: Possibilities  Size of the bulk:  max 40cm x 40cm  Pattern : mini 600 mesh  Metals: stainless steel  Spacers:  75µm height (150µm, 225µm…), modified epoxy  Multi grid systems (under study)

22. EST-DEM R. De Oliveira 20 Dec., ‘04 Bulk MicroMegas: Examples

23. EST-DEM R. De Oliveira 20 Dec., ‘04 Readout Circuits 1 Direction 2 Directions 3 Directions “3D” Pixel

24. EST-DEM R. De Oliveira 20 Dec., ‘04 2D Polyimide 50 um Image the micro-vias Chemical drilling Metallization 15 um Photolitho Glue to substrate S of X = S of Y

25. EST-DEM R. De Oliveira 20 Dec., ‘04 Example of Single Side (1D) Readout board for NA48 Experiment Close-up of readout board

26. EST-DEM R. De Oliveira 20 Dec., ‘04 Example of 2D Readout Circuit 2D readout board glued on low intrinsic radiation Plexiglas substrate Readout active area

27. EST-DEM R. De Oliveira 20 Dec., ‘04 Example of “3D” Readout for TPC with backside connection 30cm diameter 18000 pads

28. EST-DEM R. De Oliveira 20 Dec., ‘04 Pixel Close-up view Pad : 1mm Pitch : 1.05mm 1024 pads on a diameter of 35mm Smallest pad produced : 250µm Pitch: 300 µm

29. EST-DEM R. De Oliveira 20 Dec., ‘04 Readout Possibilities  Supporting materials :  FR4  Metals  Flexible :  without substrate  Low mass :  Carbon composite  Low intrinsic radiation :  Plexiglas  Kevlar Composite

30. EST-DEM R. De Oliveira 20 Dec., ‘04 Other Detectors  Micro-groove *  Micro-well * * R. Bellazzini group, INFN-Pisa, and University of Pisa

31. EST-DEM R. De Oliveira 20 Dec., ‘04 Micro-groove Bottom lines Top lines 12 x 10cm groove detector Close-up view

32. EST-DEM R. De Oliveira 20 Dec., ‘04 Micro-well 3 x 3 cm well detector Close-up view Bottom linesTop electrode