1. Nano Drive Technology for Stepping Motors based on Computational Intelligence Kaoru Hirota* Naoyoshi Yubazaki** Akira Muto** Kenji Okumura** * Tokyo Institute of Technology ** Mycom Inc. 1/6

2. Contents Nano Drive Control INS20 series （ Video ） INS50 series （ Video ） Gate Type Robot （ Video ） 2/6

3. Nano Drive Control Driver Excitation Power control Pulse signal Stepping motor 5,000,000 divisions per revolution 1mm pitch lead screw 0.2 nm unit positioning per pulse 3/6

4. Nano Drive Control Algorithm 1. Opt data for ctl value recorded in advance 2. PWM value estimated 3. New data set created 4. PWM value for pulse put into memory table 5. Output of 5 phase step motor verified 6. Resolution improved by repeating 1 to 5 4/6

5. Performance Evaluation Speed/torque Starting speed Step angle accuracy Equiangular step in high resolution Motor vibration Motor heating loss 5/6

6. Continued Nano Drive Control INS20 series （ Video ） INS50 series （ Video ） Gate Type Robot （ Video ） 6/6