1. ANSYS for MEMS by Manjula1 FEM of MEMS on ANSYS MEMS Summer 2007 Why FEM for MEMS? Features in ANSYS Basic Procedures Examples

2. ANSYS for MEMS by Manjula2 Purpose of FEA MEMS Summer 2007 Make development cycle short and cost effective To understand behaviors, limits and interactions of complex processes To optimize designs For failure analysis

3. ANSYS for MEMS by Manjula3 ANSYS Environment MEMS Summer 2007 Has GUI and Coded (for Batch Mode) command interfaces Enable to both creation and importing of models Capable of Linear and Non-linear analysis on the phenomena of Structural, Thermal, Electromagnetic, Electrostatics, Fluid, etc. Ability to simulate Coupled-field behaviors.

4. ANSYS for MEMS by Manjula4 Processors MEMS Summer 2007 Start with Begin level – Job name, File name, etc Preprocessor – Model creation Solution Processor - Apply Loads and Solving Postprocessors - Analyzing Results

5. ANSYS for MEMS by Manjula5 GUI vs Codes MEMS Summer 2007 Advantage of Repetition and parametric design with codes Easy to follow and to visualize with GUI Over 1200 commands with specific syntaxes for codes Help file for each command on codes Batch mode execution by codes

6. ANSYS for MEMS by Manjula6 Model Creation MEMS Summer 2007 Import or Create To create - Keypoints, lines, areas and volumes Material properties and real constants Element type and Meshing

7. ANSYS for MEMS by Manjula7 Units MEMS Summer 2007

8. ANSYS for MEMS by Manjula8 Applying Loads MEMS Summer 2007 Boundary Conditions Various Types of Loads –Structural displacements, forces, pressures, temperatures (for thermal strain), gravity –Thermal temperatures, heat flow rates, convections, internal heat generation, infinite surface –Electrical electric potentials (voltage), electric current, electric charges, charge densities, infinite surface –Fluids velocities, pressures –Magnetic potentials, magnetic flux, magnetic current segments, source current density, infinite surface Can apply loads in Steps

9. ANSYS for MEMS by Manjula9 Solution and View Results MEMS Summer 2007 Specify analysis type and solve Post1 is used to review results from static or steady state problems Post26 is used to review results from transient problems. Reading results by… –By Sets –Load Step (LS) –Time/frequency

10. ANSYS for MEMS by Manjula10 Example MEMS Summer 2007 Let’s follow Multiphysics Analysis of a Thermal Actuator in Ansys Tutorial