1. 1 ISPD 2007 Austin, TX Rules vs. Tools Lou Scheffer. Lars Liebmann,, Riko Radojcic, David White ISPD Austin, March 2006

2. 2 ISPD 2007 Austin, TX What’s the problem? What are designers allowed to design? Design rules are the traditional solution But modern processes are very complex ‑ Rule books become huge (>600 pages) ‑ Too much to easily remember and use ‑ Still do not tell enough Two possible solutions ‑ Restricted rules - ‘Rules’ ‑ Model based design – ‘Tools’

3. 3 ISPD 2007 Austin, TX What’s wrong with the current system In the beginning, there was a rule for contact spacing…

4. 4 ISPD 2007 Austin, TX What’s wrong with the current system Then there were different same-net rules ‑ This was pretty easy to understand

5. 5 ISPD 2007 Austin, TX What’s wrong with the current system Then the spacing started to depend on the number of neighbors 0, 1, or 2 Neighbors > 2 neighbors

6. 6 ISPD 2007 Austin, TX What’s wrong with the current system Now need a rule on what constitutes a neighbor These are officially neighbors

7. 7 ISPD 2007 Austin, TX What’s wrong with the current system So a 3x3 array uniformly needs the ‘big’ rule

8. 8 ISPD 2007 Austin, TX What’s wrong with the current system And some clever designer notices this Now you can use the 2 neighbor rule!

9. 9 ISPD 2007 Austin, TX What’s wrong with the current system But the fab does not think this should be allowed No, you cannot use the 2 neighbor rule!

10. 10 ISPD 2007 Austin, TX What’s wrong with the current system So now there is a rule stating ‘It is not legal to remove the middle via of a 3x3 array in order to use the 2 neighbor rule’ Hard to check in DRC Hard to remember Is this a good use of everyone’s time? Does it really make a yield difference?

11. 11 ISPD 2007 Austin, TX So what could you do? ‘Rules’ – here is a list of the legal via arrays. You must use one of these. ‘Tools’ – here is a test that tells which via arrays are manufacturable. Any via array this passes this test is OK. ‘Extreme tools’ – here is a model that predicts via fail rate in manufacturing. You decide.

12. 12 ISPD 2007 Austin, TX Can do this at many levels Layout ‑ Example : Restricted design rules Circuit ‑ Example: No dynamic logic Architecture ‑ Example: Must have latches on block boundaries

13. 13 ISPD 2007 Austin, TX Problem not unique to IC design 3 cases from other fields ‑ One where both approaches are used, with extreme size differences ‑ One where rules are used ‑ One where models are used

14. 14 ISPD 2007 Austin, TX Law vs ethics What is allowed behavior? ‑ Rules based – legal systems ‑ Tools based – honor codes Specify by laws (info from Wikipedia, USA federal only) ‑ Divided into 50 ‘titles’; each 1 or more printed volumes ‑ Titles may optionally be divided into subtitles, parts, subparts, chapters, and subchapters. ‑ For example, privacy act of 1974 is “Title five, United States Code, section five hundred fifty-two A."

15. 15 ISPD 2007 Austin, TX Law vs Ethics The basic intent of all these laws can be replaced by an ‘honor code’, such as ‑ A cadet will not lie, cheat, steal, or tolerate those who do Much, much shorter (5 orders of magnitude?) but requires interpretation

16. 16 ISPD 2007 Austin, TX Example where rules are the accepted way Civil engineering – building codes Detailed code not needed in principle Quite conservative (6x safety factors) Reduces the chance of error ‑ Designed to be easy to inspect Reduces the consequence of error ‑ Big safety factor ‑ Makes sure common failures are addressed ‣ Multiple exits, exit lighting, width of doorways, etc.

17. 17 ISPD 2007 Austin, TX Example where models are the rule Food – both rules and info are possible: Rule: Eat your vegetables before dessert Tool: each food lists calories and ingredients; you decide what to eat. Different people have different tradeoffs Disclose, then let people decide for themselves

18. 18 ISPD 2007 Austin, TX Benefits from restricted rules? Problem: Even a simple wire is hard to predict Lithography is a complex operation ‑ Designer draws a polygon ‑ OPC is applied (very non-linear) ‑ Exposure through a complex optical system ‑ Develops a non-linear resist, then etch Need to add CMP to model vertical dimension Then need to compute range of variation Can all be modelled, but it’s not easy

19. 19 ISPD 2007 Austin, TX Possible solution: Instead of this:

20. 20 ISPD 2007 Austin, TX Restricted design rules: Do this One direction, one width, one spacing, all wires on grid, all empty spaces filled

21. 21 ISPD 2007 Austin, TX Tried this as an experiment Forbid wrong way in router Wire length only 1% greater Routability unchanged 10% more vias But if this lets you print smaller, it’s a (big) net win!

22. 22 ISPD 2007 Austin, TX Same true for devices

23. 23 ISPD 2007 Austin, TX Implications for Designer For designer/CAD, looks like lots of restrictions ‑ Power routes must be wires in parallel ‑ Wide signal nets must be parallel wires ‣ Delay computation must handle loops ‑ Routers cannot jog – more vias ‑ IP blocks cannot be rotated Litho folks often phrase this as ‘This is needed, or you won’t get 45 (or 32 or 22 nm…) Designers don’t believe this for historical reasons Looks like the fab is saying “Eat your vegetables”

24. 24 ISPD 2007 Austin, TX Implications for Fab Litho is very easy; can be tuned for direction ‑ Illumination and polarization can be optimized CMP is very easy ‑ No width effects, small density variations Can help with non-modelled effects These are nice for the fab, but designer does not care Can produce a smaller pitch Variation can be (much) less These are things designers value

25. 25 ISPD 2007 Austin, TX Political implications Fab needs to ‘share’ the benefits, e.g. ‑ 90 nm pitch with restricted rules ‑ Smaller variation Or ‑ 100 nm pitch with arbitrary geometries but larger variation Then designers could see the benefit, and decide for themselves…

26. 26 ISPD 2007 Austin, TX And now our panelists Each with a different perspective Lar Liebmann ‑ Litho guy David White ‑ CMP modeller Riko Radojcic ‑ User perspective

27. 27 ISPD 2007 Austin, TX Questions to keep in mind Can the average engineer use complex models productively? Can the EDA tools use these models? Can the fabs provide these models, keep them updated, and stand behind them? Won't this keep fabs from making improvements to their process?

28. 28 ISPD 2007 Austin, TX More questions What's the relative importance of time to market and getting the most out of the silicon? How big is the penalty, or benefit, for using restricted rules? Of the many problems (litho, CMP, lifetime degradation, etc.) which should be treated by rules and which by models? Should this be design dependent?