1. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology Adviser ： Adviser ： Kuen-Hsien Wu Reporter: Jai-Ming Tang 2013/12/24 XRD (X-ray diffractometer) X 光繞射儀

2. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 2 Outline 1.Introduction 2.Principles 3.Application 4.Conclusion 5.References

3. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology Introduction The Braggs were awarded the Nobel Prize in physics in 1915 for their work in determining crystal structures beginning with NaCl, ZnS and diamond. Bragg's law was used to explain the interference pattern of X-rays scattered by crystals, diffraction has been developed to study the structure of all states of matter with any beam, e.g., ions, electrons, neutrons, and protons.

4. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 4 Introduction What is X-ray Diffraction

5. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 5 Introduction Why XRD? Measure the average spacings between layers or rows of atoms Determine the orientation of a single crystal or grain Find the crystal structure of an unknown material Measure the size, shape and internal stress of small crystalline regions

6. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 66 Principles

7. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 7 Principles

8. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 88 Principles

9. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 99 Principles

10. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 10 Principles

11. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 11 Principles

12. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 12 Principles

13. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 13 Application

14. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 14 Conclusion Non-destructive, fast, easy sample prep High-accuracy for d-spacing calculations Can be done in-situ Single crystal, poly, and amorphous materials Standards are available for thousands of material systems

15. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 15 References

16. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 16 References

17. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology 17 Thanks for your attention !

18. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology

19. NEM Lab. NEM Lab. Nano-electronic materials Lab. Southern Taiwan University of Science and Technology