1. MST-11 Class 100/10,000 Cleanroom User Facility Catherine Mombourquette 606-1990 cmombo@lanl.gov Brian Crone 667-0344 bcrone@lanl.gov http://iiswww.mst.lanl.gov/cleanroom/index.asp (LANL internal site, external site in progress)

2. Capabilities Deposition (RF Sputtering, E-Beam, Oxidation) Wet Processing Patterning ( Karl Suss MJB3 Mask Aligner) Dry Etching (Oxford RIE) Thermal Processing (RTP, Tube Furnace) Characterization / Analytical (Ellipsometer, Profilometer, Probe Station, XRD*, XRF*, SEM*) Assembly / Packaging (Wire Bonder, Spot Welder) Sample Preparation (Dicing Saw, Ultrasonic Cleaner, Plasma Asher) * additional fee ( contact Fernando Garzon)

3. Cost Structure* Option #1 Individual user pass Full Facility Single Tool (Ellips/Dektak) Day pass $500 Week pass $1000 Month pass $2000 $500 Year pass $5000 $1000 Option #2 Group pass –$50K for the entire group for a year. * Costs are for LDRD codes, other codes will incur appropriate taxes