1. Scanning Electron Microscope, SEM
Jingming Long, Nanna Rut Jónsdóttir, Kári Sveinbjörnsson & Guðfinnur Baldur Skæringsson
12/10/2010

2. Content
1. The principle of SEM
2. Device
3. Sample preparation

3. The principle of SEM
5~10nm
0.5~2nm

4. Device 背向散射 電子偵測器 Nitrogen gas inlet Column Controlers X-Ray Detector
Sample Chamber Door
Gold Coater?

5. Device

6. Device

7. Sample preparation
All samples must conduct electricity. To measure a non-conducting sample it must be covered with a thin layer of gold.
Non-conducting samples usually not chemically analyzed. Sulphur cannot be analyzed in a non-conducting sample, Au and S appear at similar places in X-ray.
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8. Example
Secondary electron
Backscattered electron

9. Example Energy dispersive spectrometry EDS
X ray characteristics analysis of element