2. Presentation Outline February 25 th 20112Microfabrication Design Challenge 2011

3. Design February 25 th 2011Microfabrication Design Challenge 20113

4. Device Fabrication Process Flow Template February 25 th 2011Microfabrication Design Challenge 20114 Insert substrate 2 nd layer Insert substrate UV Photolithography Insert Process 2 nd layer Insert substrate 3 rd layer Processes Available (add other processes if needed) Spin coat Deep reactive ion etch Wet etch Spray coatReactive ion etch PDMS Mold Dry etch Chemical Vapor Deposition (CVD) Low Pressure CVD Plasma Enhanced CVD Copy and add additional layers if needed Use the square selection tool in the drawing tool bar to select and move multiple objects at once.

5. Device Fabrication (Animation Template) 1.Insert fab steps here. 2.Place white shapes over layers to show etch and lithography steps. 3.Use custom animation feature to sequence the adding and etching of material. February 25 th 2011Microfabrication Design Challenge 20115 Insert substrate here 3 rd layer PMMA 2 nd layer 4 th layer

6. Process Flow February 25 th 2011Microfabrication Design Challenge 20116

7. Post-fabrication Modifications February 25 th 2011Microfabrication Design Challenge 20117

8. Improvements Made in this Design February 25 th 2011Microfabrication Design Challenge 20118

9. Conclusions February 25 th 2011Microfabrication Design Challenge 20119