1. Scalable nanostructuring on polymer by a SiC stamp: optical and wetting effects
Aikaterini Argyraki, Weifang Lu, Paul Michael Petersen, Haiyan Ou
Department of Photonics Engineering, Technical University of Denmark
My talk for today is entitled : Scalable nanostructuring on polymer by a SiC stamp. Optical and wetting properties. As you might be able to see from the title I will discuss 4 points of interest. 1)The nano fabrication of the stamp. 2) the replication of the nanostructures on the polymer. 3) the optical effects due to nanostructuring and 4) the wetting effects after nanostructuring.

2. Outline Motivation - Wafer-Scale nanostructuring of SiC stamp
- Replication of nanostructures on a polymer
surface
-Optical effects
-Wetting properties
Conclusions
Fabrication
Characterization
Answer to questions like :Why is it important to be able to nanostructure on large interfaces. Why on polymer?
See the farication process :nano engineering part
Characterization: what macroscopic properties can we achieve?Conclude
Technical University of Denmark Aikaterini Argyraki

3. Motivation
Push performance of devices towards their optimum limits by controlable fabrication of interfaces at the nanoscopic level.
Polymer materials gain interest both as semiconductors and conductors due to their low cost.
Cell proliferation. Bactericidal attachment and survival. Photoluminescence. Absorbance.
Technical University of Denmark Aikaterini Argyraki

4. and….nanopattern definition must be: Rapid Low-cost
Prerequisites
Fabrication of nanostructures that result in macroscale effects with reproducibility !
and….nanopattern definition must be:
Rapid
Low-cost
Applicable on wafer scale-high throughput
Technical University of Denmark Aikaterini Argyraki

5. SiC nanostructuring: summary table
Type of structures
Method
Average Reflectance (%)
Luminecence enhancement (from 10 to 80 degrees)
Periodic
E-beam
1,01
104%
Semi-periodic
Self-assembly
1,62
67%
Tradeoff between low cost and performance. Low cost method had issues of compatibility with equipment for wafer processing due to the Au mask.
*Reference:
Y. Ou, et al., Optics Express 20, 7, 2012.
Y. Ou, et al., Opt. Lett. 37, 18, 2012.
Periodic Semi-periodic 5
Technical University of Denmark Aikaterini Argyraki

6. A cost effective method for SiC aperiodic nanostructuring
Reactive ion etching. High-energy ions from the plasma attack the wafer .
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7. Combinatory masking 200nm 7
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8. Ramping: RIE conditions+ Al thickness *Reference:
Measurement goniometer
*Reference:
A. Argyraki et al., Optical Materials Express 8(3) 2013.

9. Fabrication of different nanotopographies
Color texture changes due to nanostructuring 9

10. Optical properties: Reflection, Transmission
Average 25%
Average 37%
Average 33%
Average 5%
Average 13%
Average 0,5%
Integrating sphere.
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11. Scalability
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12. Summary table Type of structures Method Average Reflectance (%)
Luminecence enhancement (from 10 to 80 degrees)
Periodic
E-beam
1,01
104%
Semi-periodic
Self-assembly*
1,62
67%
Stochastic
Combinatory masking
0,50
165%
*Reference:
Ou, H., Advances in wide bandgap SiC for optoelectronics, The European Physical Journal B
Periodic Semi-periodic
Stochastic 12
Technical University of Denmark Aikaterini Argyraki

13. Replication of nanostructures on polymer
Process flow
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14. Ni shim: generation
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15. Nanostructured polymer surface
Good replication of structures but with more rounded edges.
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16. Color textures after nanostructuring on polymer
A thin Al layer (~40nm) 16

17. Optical and wetting properties after nanostructuring on polymer
Average 88%
Average 11%
Average 85%
Average 5%
Average 33%
Average 3%
68 degrees
123 degrees
75 degrees
132 degrees
Polymer-bare
Polymer-nano
Al coated-bare
Al coated-nano

18. Conclusions
Demonstrated 2 inch wafer nanostructuring on polymer by a SiC stamp
Color texture and transmitance of SiC surface was controled by nanotopography applied
Color texture and reflectance of polymer surface was significantly altered by nanostructuring and additional deposition of a thin Al layer
Wetting properties of surfaces shifted after nanostructuring from hydrophilic to hydrophobic
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19. Acknowledgment Weifang Lu Yiyu Ou Paul Michael Petersen Haiyan Ou 19
Assistance.
Weifang Lu
Yiyu Ou
Paul Michael Petersen
Haiyan Ou
Technical University of Denmark Aikaterini Argyraki 19

20. Thank you for your attention
Contact info:
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